Projekte
Hochpräzisions-Sensor zur Positionsbestimmung von AFM-Messköpfen
Projektbeschreibung
This project, completed in 2012, concerned the design and demonstration of novel optical methods for extremely high precision measurement of mechanical displacement. Accuracy in the single nanometer range over long measurement distances was achieved.
Laufzeit
01.05.2011 bis 30.04.2012
Projektleitung
Prof. Dr. Hans Zappe
Ansprechpartner/in
Dr. Andreas Seifert
Telefon:7560
Kooperationspartner
Nanosurf AG (CH)