Projects
Pore evolution in metal-assisted-chemically etched (MACE) porous Si
Project description
The project is focused on a deeper understanding of catalyst migration and pore evolution in metal-assisted-chemically etched (MACE) porous Si by Atomic Layer Deposition-Fill-Etch-Imaging (AFEI).
Start/End of project
01.05.2014 until 31.12.2018
Project manager
Zacharias M
Contact person
Zacharias M
Phone:0761 203-7421
Email:zacharias@imtek.de
Keywords
Nano, Nanotechnology, Materials, Nanomaterials, Nanostructures, Silicon, Metal, Etching, Porous Silicon, Atomic Layer Deposition