Publications

• Journal Articles
• Books
• Book chapters
• Talks
• Conference papers

Journal Articles

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2020

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• B.P. Bruno, R. Schütze, R. Grunwald, U. Wallrabe
  Micro Fresnel mirror array with individual mirror control
  2020 Smart Material Struct., volume: 29, issue: 7, pages: 075003 - 075011
• A. Müller, M.C. Wapler, B.P. Bruno, U. Wallrabe
  Novel fabrication process for aspherical microlenses
  2020 Opt Lett, volume: 45, issue: 2, pages: 587 - 590
• B. Kar, U. Wallrabe
  Performance enhancement of an ultrasonic power transfer system through a tightly coupled solid media using a KLM model
  2020 Micromachines, volume: 111, issue: 355

2019

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• F. Suárez Sandoval, S.M. Torres Delgado, A. Moazenzadeh, U. Wallrabe
  A 2D magnetoinductive wave device for freer wireless power transfer
  2019 IEEE Tansactions of Power Electronics, volume: 34, issue: 11, pages: 10433 - 10445
• A. Müller, M. C. Wapler, U. Wallrabe
  A quick and accurate method to determine the Poisson’s ratio and the coefficient of thermal expansion of PDMS
  2019 Soft Matter, volume: 15, pages: 779 - 784
• K. Philipp, F. Lemke, S. Scholz, U. Wallrabe, M.C. Wapler, N. Koukourakis, J.W. Czarske
  Diffraction-limited axial scanning in thick biological tissue employing an aberration correcting adaptive lens
  2019 Scientific Reports, supplement: 9:9532, page: 11pp
• F. Lemke, Y. Frey, B.P. Bruno, K. Philipp, N. Koukourakis, J. Czarske, U. Wallrabe, M.C. Wapler
  Non-linear simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis and fabrication effects
  2019 Smart Mater Struct, volume: 28, supplement: 055024, page: 13pp
• S. Bär, T. Oerther, M. Weigel, A. Müller, P. Hucker, J.G. Korvink, C. Ko, M.C. Wapler, J. Leupold
  On the application of balanced steady-state free precession to MR Microscopy
  2019 Magn Reson Mater Phy
• B.P. Bruno, A.R. Fahmy, M. Stürmer, U. Wallrabe, M.C. Wapler
  Properties of piezoceramic materials in high electric field actuator applications
  2019 Smart Material Structures, volume: 28, supplement: 015029, page: 14pp
• R. Zhu, U. Wallrabe, P. Woias, M.C. Wapler, U. Mescheder
  Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator
  2019 J Micromech Microeng, volume: 29, supplement: 055001, page: 10pp
• H.G.B. Gowda, U. Wallrabe
  Simulation of an adaptive fluid-membrane piezoelectric lens
  2019 Micromachines-basel, volume: 10, issue: 797

2018

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• M.C. Wapler, F. Lemke, G. Alia, U. Wallrabe
  Aspherical high-speed varifocal mirror for miniature catadioptric objectives
  2018 Opt Express, volume: 26, issue: 5, pages: 6090 - 6102
• S. Adhikari, V. Badilita, U. Wallrabe, J.G. Korvink
  Capacitor re-design overcomes the rotation rate limit of MACS Resonators.
  2018 Conc. Mag. Res. B
• R. Lausecker, P. Bollgruen, U. Gleißner, U. Wallrabe
  Digital lithography based, on renewable materials as a tool for environmentally benign microfabrication
  2018 J Clean Prod, volume: 172, pages: 3092 - 3101
• M. Gorostiaga, M.C. Wapler, U. Wallrabe
  Optimizing piezoelectric receivers for acoustic power transfer applications.
  2018 Smart Material Structures, volume: 27, issue: 075024, page: 10pp
• M. Abdo, E. Förster, P. Bohnert, V. Badilita, R. Brunner, U. Wallrabe, J.G. Korvink
  Pushbroom hyperspectral imaging: from passive to active systems components
  2018 Rev Sci Instrum, volume: 89, issue: 8, supplement: 083113, page: 11pp
• J. Schmitt, A. Meier, U. Wallrabe, F. Völklein
  RIE (CF4/Ar) and IBE etching of various glasses for diffractive optical element fabrication.
  2018 Int J Appl Glass Sci, volume: 9, issue: 4, pages: 499 - 509

2017

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• M. Gorostiaga, M.C. Wapler, U. Wallrabe
  Analytic model for ultrasound energy receivers and their optimal electric loads
  2017 Smart Material Structures, volume: 26, issue: 085003, page: 13 pp
• M. Gorostiaga, M.C. Wapler, U. Wallrabe
  Analytic model for ultrasound energy receivers and their optimal electric loads II- Experimental validation
  2017 Smart Material Structures, volume: 26, issue: 105115.R, page: 13 pp
• S. Adhikari, V. Badilita, U. Wallrabe, J.G. Korvink
  Capacitor re-design overcomes the rotation rate limit of MACS resonators
  2017 Concepts Magn Reson Part B, volume: 47B, supplement: e21362
• F. Suárez Sandoval, A. Moazenzadeh, U. Wallrabe
  Comprehensive modelling of 1D magnetoinductive wave devices for wireless power transfer
  2017 IEEE Transactions of Power Electronics
• J. Schmitt, W. Nelissen, U. Wallrabe, F. Völklein
  Implementation of smooth nanocrystalline Diamond microstructures by combining Reactive Ion Etching an Ion Beam Etching
  2017 Diamond and Related Materials, volume: 79, pages: 164 - 172
• J. Schmitt, S. Hengsbach, K. Bade, U. Wallrabe, F. Völklein
  Ion beam etching of multilevel masking layers written by two-photon lithography
  2017 J Micromech Microeng, volume: 27, issue: 075014, page: 10pp
• N. Spengler, P.T. While, M.V. Meissner, U. Wallrabe, J.G. Korvink
  Magnetic Lenz lenses improve the limit-of-detection in nuclear magnetic resonance
  2017 Plos One, volume: 12, issue: 8, supplement: e0182779
• F. Suarez Sandoval, S.M. Torres Delgado, A. Moazenzadeh, U. Wallrabe
  Nulls-free wireless power Transfer with straightforward control of magnetoindutive waves
  2017 IEEE T Microw Theory, volume: 65, issue: 4, pages: 1087 - 1093
• A. Müller, M. C. Wapler, U. Wallrabe
  Segmented Bessel beams
  2017 Opt Express, volume: 25, pages: 22640 - 22647
• K. Poletkin, Z. Lu, U. Wallrabe, J. Korvink, V. Badilita
  Stable dynamics of micro-machined inductive contactless suspensions
  2017 Int. Journal of Mech. Sciences, volume: 131-132, pages: 753 - 766

2016

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• A. Treffer, J. Brunne, M. Bock, S. König, U. Wallrabe, R. Grunwald
  Adaptive non-collinear autocorrelation of few-cycle pulses with an angular tunable bi-mirror
  2016 Appl Phys Lett, volume: 108, page: 051103
• R. Zhu, U. Wallrabe, M.C. Wapler, P. Woias, U. Mescheder
  Dielectric electroactive polymer membrane actuator with ring-type electrode as driving component of a tactile actuator
  2016 Procedia Engineering, volume: 168, pages: 1537 - 1540
• E. Förster, M. Stürmer, U. Wallrabe, J. Korvink, P. Bohnert, R. Brunner
  Dual-mode spectral Imaging System employing a Focus variable lens
  2016 Advanced Optical Technologies
• N. Spengler, J. Höfflin, A. Moazenzadeh, D. Mager, N. MacKinnon, V. Badilita, U. Wallrabe, J.G. Korvink
  Heteronuclear micro-Helmholtz coil facilitates µm-range spatial and sub-Hz spectral resolution NMR of nL-volume samples on customisable microfluidic chips.
  2016 Plos One, volume: 11, issue: 1, page: e0146384
• R. Lausecker, V. Badilita, U. Gleißner, U. Wallrabe
  Introducing thermoplastic natural shellac to microfluidics: a green fabrication method for point-of-care applications
  2016 Biomicrofluidics, volume: 10, page: 044101
• M. Stürmer, M. C. Wapler, J. Schmitt, F. Völklein, U. Wallrabe
  Phase gratings with tunable diffraction efficiency
  2016 Opt Express 2016, volume: 24, issue: 21, pages: 23765 - 23776
• K. Poletkin, Z. Lu, A. Moazenzadeh, s.G. Mariappan, J.G. Korvink, U. Wallrabe, V. Badilita
  Polymer magnetic composite Core boosts performance of 3D miromachined inductive contactless suspensions
  2016 IEEE Magnetic Letters, volume: 7, issue: 1307603
• S.G. Mariappan, A. Moazenzadeh, U. Wallrabe
  Polymer magnetic composite core based microcoils and microtransformers for very high frequency power applications
  2016 MIcromachines, volume: 7, issue: 60
• A. Müller, M. C. Wapler, U. T. Schwarz, M. Reisacher, K. Holc, O. Ambacher, U. Wallrabe
  Quasi-Bessel beams from asymmetric and astigmatic illumination sources
  2016 Opt Express, volume: 24, issue: 15, pages: 17433 - 17452
• S. Schuhladen, K. Banerjee, M. Stürmer, P. Müller, U. Wallrabe, H. Zappe
  Variable optofluidic slit aperture
  2016 Light: Science and Applications, volume: 5, issue: e16005
• K. Philipp, A. Smolarski, N. Koukourakis, A. Fischer, M. Stuermer, U. Wallrabe, J.W. Czarske
  Volumetric HiLo microscopy employing an electrically tunable lens
  2016 Opt Express 2016, volume: 24, issue: 13, pages: 15029 - 15041

2015

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• A. Moazenzadeh, F. Suárez Sandoval, N. Spengler, V. Badilita, U. Wallrabe
  3-D Microtransformers for DC-DC On-Chip Power Conversion
  2015 Ieee T Power Electr, volume: 30, issue: 9, pages: 5088 - 5102
• K. V. Poletkin, Z. Lu, U. Wallrabe, V. Badilita
  A new hybrid micromachined contactless Suspension with linear and angular positioning and adjustable dynamics
  2015 J Microelectromech S, volume: 24, issue: 5, pages: 1248 - 1250
• E. Förster, M. Stürmer, U. Wallrabe, J. Korvink, R. Brunner
  Bio-inspired variable imaging system simplified to the essentials: modelling accommodation and gaze movement
  2015 Opt Express, volume: 23, issue: 2, pages: 929 - 942
• K. V. Poletkin, U. Wallrabe
  Static behavior of closed-loop micromachined levitated two-axis rate gyroscope
  2015 IEEE Sens J, volume: 15, issue: 12, pages: 7001 - 7008

2014

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• Z. Lu, K.V. Poletkin, B. den Hartogh, U. Wallrabe, V. Badilita
  3D micro-machined inductive contactless Suspension: Testing and Modeling
  2014 Sensors and Actuators A: Physical, volume: 220, pages: 134 - 143
• J. Brunne, M.C. Wapler, U. Wallrabe
  A fast and robust piezoelectric Axicon mirror
  2014 Opt Lett, volume: 39, issue: 15, pages: 4631 - 4634
• K. Poletkin, A. Chernomorsky, C. Shearwood, U. Wallrabe
  A qualitative analysis of designs of micromachined electromagnetic inductive contactless suspension
  2014 Int. Journal of Medical Sciences, volume: 82, pages: 110 - 121
  
   
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• Nektarios Koukourakis, Markus Finkeldey, Moritz Stuermer, Christoph Leithold, Nils C. Gerhardt, Martin R. Hofmann, Ulrike Wallrabe, Jürgen W. Czarske, Andreas Fischer
  Axial scanning in confocal microscopy employing adaptive lenses (CAL)
  2014 Opt Express, volume: 22, issue: 5, pages: 6025 - 6039
• Wapler M, Leupold J, Dragonu I, von Elverfeld D, Zaitsev M, Wallrabe U
  Magnetic properties of materials for MR engineering, micro-MR and beyond
  2014 J Magn Reson, volume: 242C, pages: 233 - 242
• N. Spengler, A. Moazenzadeh, R. Ch. Meier, V. Badilita, J. G. Korvink, U. Wallrabe
  Micro-fabricated Helmholtz coil featuring disposable microfluidic sample inserts for applications in nuclear magnetic resonance
  2014 JMM, volume: 24, pages: 034004 - 034016
• R. Ch. Meier, J. Höfflin, V. Badilita, U. Wallrabe, J. G. Korvink
  Microfluidic integration of wirebonded microcoils for on-chip applications in nuclear magnetic resonance
  2014 J. Micromech. Microeng., volume: 24, pages: 045021 - 045033
• Z. Lu, K.V. Poletkin, U. Wallrabe, V. Badilita
  Performance characterization of micromachined inductive suspensions based on 3D wire-bonded microcoils
  2014 Micromachines, volume: 5, pages: 1469 - 1484
  
   
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• Z. Lu, K. V. Poletkin, U. Wallrabe, V. Badilita
  Performance characterization of micromachined inductive suspensions based on 3D wirebonded microcoils
  2014 Micromachines-basel, volume: 5, issue: 4, pages: 1469 - 1484
• Matthias C Wapler, Moritz Stuermer, Jens Brunne, Ulrike Wallrabe
  Piezo films with adjustable anisotropic strain for bending actuators with tunable bending profiles
  2014 Smart Mater Struct, volume: 23, issue: 5, page: 055006

2013

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• Matthias C Wapler, Jens Brunne, Ulrike Wallrabe
  A new dimension for piezo actuators: free-form out-of-plane displacements of single piezo layers
  2013 Smart Mater Struct, volume: 22, issue: 10
• K. Poletkin, A. Chernomorsky, C. Shearwood, U. Wallrabe
  A qualitative analysis of designs of micromachined electromagnetic inductive contactless suspension
  2013 International Journal of Mechanical Sciences
• Jens Brunne, Matthias C. Wapler, Rüdiger Grunwald, Ulrike Wallrabe
  A tunable piezoelectric Fresnel mirror for high-speed lineshaping
  2013 J. Micromech. Microeng., volume: 23, issue: 11, page: 11502
• A. Moazenzadeh, S.H. Moosavi, N. Spengler, R. Zeiser, U. Wallrabe
  Analysis of packaging effects on wire bonder made microtransformer chips
  2013 Journal of Physics, page: 012110
• C. Cepnik, U. Wallrabe
  Approaches for a fair comparison and benchmarking of electromagnetic vibration energy harvesters
  2013 Micromachines, volume: 4, pages: 286 - 305
• Moser, Rüdiger, Goßler, Christian, Kunzer, Michael, Kohler, Klaus, Pletschen, Wilfried, Brunne, Jens, Schwarz, Ulrich T., Wagner, Joachim
  Laser direct writing of GaN-based light-emitting diodes- The suitable laser source for mesa definition
  2013 J Appl Phys, volume: 113, issue: 10, pages: 103107 - 103113
• C. Cepnik, R. Lausecker, U. Wallrabe
  Review on electrodynamic energy harvesters - classification approach
  2013 Micromachines, volume: 4, pages: 168 - 196
• M. Bock, J. Brunne, A. Treffer, S. König, U. Wallrabe, R. Grunwald
  Sub-3-cycle vortex pulses of tunable topological charge
  2013 Opt Lett, volume: 38, issue: 18, pages: 3642 - 3645
• Jens Brunne, Ulrike Wallrabe
  Tunable MEMS axicon mirror arrays
  2013 Opt. Lett., volume: 38, issue: 11, pages: 1939 - 1941
• A.C. Fischer, J. G. Korvink, N. Roxhed, G. Stemme, U. Wallrabe, F. Niklaus
  Unconventional applications of wire bonding create new opportunities for microsystems integration
  2013 J Micromech Microeng, volume: 23, pages: 083001 - 18pp
• Moazenzadeh, A., Spengler, N., Lausecker, R., Rezvani, A., Mayer, M., Korvink, J.G., Wallrabe, U.
  Wire bonded 3D coils render air core microtransformers competitive
  2013 J Micromech Microeng, volume: 23, issue: 11, page: 114020

2012

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• R. Brunner, B. Keil, C. Morhard, D. Lehr, J. Draheim, U. Wallrabe, J. Spatz
  Antireflective "moth-eye" structures on tunable optical silicone membranes
  2012 Appl Optics, volume: 51, issue: 19, pages: 4370 - 4376
• C. Cepnik, E.M. Yeatman, U. Wallrabe
  Effects of a nonlinear magnetics on electromagnetic vibration energy harvesters
  2012 Journal on Intelligent Materials, Systems and Structures, volume: 23, issue: 13, pages: 1533 - 1541
• O.G. Gruschke, N. Baxan, L. Clad, K. Kratt, D. v. Elverfeldt, A. Peter, J. Hennig, V. Badilita, U. Wallrabe, J.G. Korvink
  Lab on a chip MR multi-platform analysis system,
  2012 Lab Chip
  
   
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• M. Raimann, A. Peter, D. Mager, U. Wallrabe, J. G. Korvink
  Micro-transformer based isolated signal and power transmission
  2012 Transactions on Power Electronics, volume: 27, issue: 9, pages: 3996 - 4004
• V. Badilita, R. C. Meier, N. Spengler, U. Wallrabe, M. Utz, J. G. Korvink
  Microscale nuclear magnetic resonance: a tool for softmatter research
  2012 Softmatter, page: 26065d
• V. Badilita, B. Fassbender, K. Kratt, C. Bonhomme, D. Sakellariou, J. G. Korvink, U. Wallrabe
  NMR single chip microprobe for sub-nanoliter magic angle coil spinning (MACS) spectroscopy via inductive coupling
  2012 PLoS ONE 7, issue: 8, page: e42848

2011

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• J. Maclaren, F. Schneider, M. Herbst, J. Hennig, R. Bammer, M. Zaitsev, U. Wallrabe
  An adaptive MR-compatible lens and objective,
  2011 Concept Magn Reson B, volume: 39, issue: 3, pages: 141 - 148
• M. Mohammadzadeh, N. Baxan, V. Badilita, K. Kratt, H. Weber, J.G. Korvink, U. Wallrabe, J. Hennig, D. v. Elverfeldt
  Characterization of a 3D MEMS fabricated micro solenoid at 9.4T,
  2011 J Magn Reson, volume: 1, pages: 20 - 26
• R. Meier, V. Badilita, J. Brunne, U. Wallrabe, J.G. Korvink
  Complex 3D high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology,
  2011 Biomicrofluidics, volume: 5, issue: 4
• C. Cepnik, O. Radler, S. Rosenbaum, T. Ströhla, U. Wallrabe
  Effective optimization of electromagnetic energy harvesters through direct computation of the electromagnetic coupling,
  2011 Sensor Actuat A-phys, volume: 167, pages: 416 - 421
  
   
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• J. Draheim, T. Burger, J.G. Korvink, U. Wallrabe
  Variable aperture stop based on the design of a single chamber silicone membrane lens with integrated actuation,
  2011 Opt Lett, pages: 2032 - 2034

2010

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• U. Wallrabe, J.G. Korvink, K. Kratt, V. Badilita, B. Mack
  3D ultra-fast manufacture micro coils on polymer and metal cores,
  2010 SAIEE Africa Research Journal, volume: 101, pages: 42 - 44
• K. Kratt, V. Badilita, T. Burger, J. G. Korvink, U. Wallrabe
  A fully MEMS compatible process for 3-D high aspect ratio micro coils obtained with an automatic wire bonder,
  2010 J Micromech Microeng, volume: 20, issue: 1
  » show abstract« hide abstract
  Abstract

  We report the fabrication of 3D micro coils made with an automatic wire bonder. Using standard MEMS processes such as spin coating and UV lithography on silicon and Pyrex® wafers results in high aspect ratio SU-8 posts with diameters down to 100 µm that serve as mechanical stabilization yokes for the coils. The wire bonder is employed to wind 25 µm insulated gold wire around the posts in an arbitrary (e.g. solenoidal) path, yielding arrays of micro coils. Each micro coil is bonded directly on-chip, so that loose wire ends are avoided and, compared to other winding methods, coil re-soldering is unnecessary. The manufacturing time for a single coil is about 200 ms, and although the process is serial, it is batch fabrication compatible due to the high throughput of the machine. Despite the speed of manufacture we obtain high manufacturing precision and reliability. The micro air-core solenoids show an RF quality factor of over 50 when tested at 400 MHz. We present a flexible coil making method where the number of windings is only limited by the post height. The coil diameter is restricted by limits defined by lithography and the mechanical strength of the posts. Based on this technique we present coils ranging from 100 µm diameter and 1 winding up to 1000 µm diameter and 20 windings.
• F. Schneider, J. Draheim, J. Brunne, P. Waibel, U. Wallrabe
  Characterisation of adaptive fluidic silicone-membrane lenses,
  2010 SAIEE Africa Research Journal, volume: 101, issue: 1, pages: 21 - 25
  » show abstract« hide abstract
  Abstract

  We compare the performance and optical quality of two types of adaptive fluidic silicone-membrane lenses. The membranes feature either a homogeneous thickness, or they are shaped resulting in an inhomogeneous cross-section. The lens systems incorporate a piezoelectric actuator which is operated in a regime of ±40 V. The shaped membrane lenses show lower wave front errors than the planar ones, down to 24 nm. The pumping actuator indicates a maximum pump volume of 1159 nl at an inner piezo radius of 2.75 mm for the smallest supporting ring configuration. The full system with a planar membrane achieves a larger refractive power ranging from +19 to -14 dpt. It also shows a shorter full scale response time (tplanar = 23.9 ms) compared to the shaped membrane (tshaped = 35.4 ms).
• T.-M. Chen, Z. Liu, J.G. Korvink, U. Wallrabe
  Design Rule and Orientation Layout for MEMS Curved Beams on Silicon,
  2010 J Microelectromech S, volume: 19, issue: 3, pages: 706 - 714
• V. Badilita, K. Kratt, N. Baxan, M. Mohmmadzadeh, T. Burger, H. Weber, D. von Elverfeldt, J. Hennig, J.G. Korvink, U. Wallrabe
  On-chip three dimensional microcoils for MRI at the micro scale,
  2010 Lab Chip, volume: 11, pages: 1387 - 1390
• S. Waselikowski, K. Kratt, V. Badilita, U. Wallrabe, J.G. Korvink, M. Walther
  Three-dimensional microcoils as terahertz metamaterial with electric and magnetic response,
  2010 Appl Phys Lett, volume: 97

2009

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• J. Draheim, F. Schneider, R. Kamberger, C. Mueller, U. Wallrabe
  Fabrication of a fluidic membrane lens system,
  2009 J Micromech Microeng, volume: 19, issue: 9
  » show abstract« hide abstract
  Abstract

  We present the fabrication process of a fluidic membrane lens system with an integrated piezoelectric pumping actuator. The optical unit and the pumping unit are fabricated through casting using a hot embossing machine. Two different systems, one with a homogeneous membrane thickness, and one with an inhomogeneous membrane thickness distribution, are manufactured. The influence of the volume shrinkage of the silicone during curing on the membrane shape and on the focal length is analyzed. The assembled system achieves a focal length between +52.4 mm and −70.9 mm at a piezovoltage of ±40 V. The full-scale response time of the system is below 24 ms.
• K.Kratt, V. Badilita, T. Burger, J. Mohr, M. Börner, J. G. Korvink, U. Wallrabe
  High aspect ratio PMMA posts and characterization method for micro coils manufactured with an automatic wire bonder,
  2009 Sensor Actuat A-phys, volume: 156, issue: 2, pages: 328 - 333
  » show abstract« hide abstract
  Abstract

  We present the development of high aspect ratio PMMA posts manufactured in deep X-ray lithography technology. The posts serve as support structures for micro coil windings. The coils are wound around these cores by an automatic wire bonder, and they are fully compatible with MEMS processes. Posts with outer diameters down to 100 μm and minimal sidewall thicknesses of 20 μm have an aspect ratio of up 38, leading to single-layer coils with more than 20 windings. With a flexible software, the winding number is only limited by the post height. We introduce a specially designed structure to determine the forces caused by the winding process. These measured forces are confirmed by shear test data. Electrical measurements show a quality factor of over 50.
• F. Schneider, J. Draheim, R. Kamberger, P. Waibel, U. Wallrabe
  Optical characterization of adaptive fluidic silicone-membrane lenses,
  2009 Opt Express, volume: 17, issue: 14, pages: 11813 - 11821
  » show abstract« hide abstract
  Abstract

  We present an extended optical characterization of an adaptive microfluidic silicone-membrane lens at a wavelength of 633 nm, respectively 660 nm. Two different membrane variations; one with a homogeneous membrane thickness, and one with a shaped cross section, have been realized. This paper includes the theoretical predictions of the optical performance via FEM simulation and ray tracing, and a subsequent orientation dependent experimental analysis of the lens quality which is measured with an MTF setup and a Mach-Zehnder interferometer. The influence of the fabrication process on the optical performance is also characterized by the membrane deformation in the non-deflected state. The lens with the homogeneous membrane of 5 mm in diameter and an aperture of 2.5 mm indicates an almost orientation independent image quality of 117 linepairs/mm at a contrast of 50%. The shaped membrane lenses show a minimum wave front error of WFERMS = 24 nm, and the lenses with a planar membrane of WFERMS = 31 nm at an aperture of 2.125 mm.
• S. Schonhardt, J. G. Korvink, J. Mohr, U. Hollenbach, U. Wallrabe
  Optimization of an electromagnetic comb drive actuator
  2009 Sensors and Actuators A, volume: 154, pages: 212 - 217
• F. Schneider, J. Draheim, R. Kamberger, U. Wallrabe
  Process and material properties of polydimethyl-siloxane (PDMS) for Optical MEMS,
  2009 Sensor Actuat A-phys, volume: 151, issue: 2, pages: 95 - 99
  » show abstract« hide abstract
  Abstract

  This article focuses on the rheological, mechanical and optical properties of polydimethylsiloxane (PDMS) relevant for microelectromechanical systems (MEMS). In view of the limited amount of published data, we analyzed the two products most commonly used in MEMS, namely RTV 615 from Bayer Silicones and Sylgard 184 from Dow Corning. As far as rheological parameters are concerned, the viscosity and spin curves were measured. With regard to mechanical properties, we focused on the measurement of the inconstant elastic modulus up to 115% strain. For the optical characterization we concentrate on the optical dispersion and the wavelength-dependent damping coefficient.

2008

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• F. Schneider, C. Müller, U. Wallrabe
  A low cost adaptive silicone membrane lens,
  2008 J Opt A-pure Appl Op, volume: 10, issue: 4
  » show abstract« hide abstract
  Abstract

  This article introduces adaptive liquid lenses with thick silicone membranes of 5 mm diameter.These membranes are produced by means of casting in a batch process. The lenses feature an integrated piezo-bending actuator, which is also embedded in silicone. The lenses presented comprise areas of application which are not covered by the electrowetting lenses (diameter <3 mm) already established on the market.
• F. Schneider, T. Fellner, J. Wilde, U. Wallrabe
  Mechanical properties of silicones for MEMS,
  2008 J Micromech Microeng, volume: 18, issue: 6
  » show abstract« hide abstract
  Abstract

  This paper focuses on the mechanical properties of polydimethylsiloxane (PDMS) relevant for microelectromechanical system (MEMS) applications. In view of the limited amount of published data, we analyzed the two products most commonly used in MEMS, namely RTV 615 from Bayer Silicones and Sylgard 184 from Dow Corning. With regard to mechanical properties, we focused on the dependence of the elastic modulus on the thinner concentration, temperature and strain rate. In addition, creep and thermal aging were analyzed. We conclude that the isotropic and constant elastic modulus has strong dependence on the hardening conditions. At high hardening temperatures and long hardening time, RTV 615 displays an elastic modulus of 1.91 MPa and Sylgard 184 of 2.60 MPa in a range up to 40% strain.
• F. Schneider, J. Draheim, C. Müller, U. Wallrabe
  Optimization of an adaptive PDMS-membrane lens with an integrated actuator,
  2008 Sensor Actuat A-phys, volume: 154, issue: 2, pages: 316 - 321
  » show abstract« hide abstract
  Abstract

  We present the first adaptive fluidic PDMS-lens system with an integrated piezoelectric pumping actuator. The system is fabricated in a highly streamlined fabrication process through casting using a hot embossing machine and the subsequent oxygen plasma bonding of the layers. With a shape optimized piezo actuator the achieved focal length ranges from 30 to 500 mm at a voltage from −9 to 44 V. We show that the lens resolution is crucially dependent on the thickness of the lens membrane. For an optimum thickness of 70 μm at 5 mm diameter the lenses achieve a resolution of 134 linepairs/mm (daperture = 2.5 mm) at a contrast of 50%.

2005

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• Wallrabe U, Solf C, Mohr J, Korvink JG
  Miniaturized Fourier Transform Spectrometer for the near infrared wavelength regime incorporating an electromagnetic linear actuator,
  2005 Sensor Actuat A-phys, volume: 123-124C, pages: 459 - 467

2004

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• Solf C, Janssen A, Mohr J, Ruzzu A, Wallrabe U
  Incorporating Design Rules into the LIGA Technology applied to a Fourier Transformation Spectrometer,
  2004 Microsyst Technol, volume: 10, pages: 706 - 710

2003

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• Mohr J, Last A, Hollenbach U, Oka T, Wallrabe U
  A Modular Fabrication Concept for Micro Optical Systems,
  2003 J Lightwave Technol, volume: 21, issue: 3, pages: 643 - 647
• Oka T, Nakajima H, Tsugai M, Hollenbach U, Wallrabe U, Mohr J
  Development of a micro-optical distance sensor,
  2003 Sensor Actuat A-phys, volume: 102, issue: 3, pages: 261 - 267
• Ruzzu A, Haller D, Mohr J, Wallrabe U
  Optoelectromechanical Switch Array with Passively Aligned Free-Space Optical Components,
  2003 J Lightwave Technol, volume: 21, issue: 3, pages: 664 - 671

2002

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• Wallrabe U, Dittrich H, Friedsdam G, Hanemann Th, Mohr J, Müller K, Piotter V, Ruther P, Schaller Th, Zißler W
  Micromolded easy-assembly multi fiber connector: RibCon,
  2002 Microsyst Technol, volume: 8, pages: 83 - 87

2001

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• Rembe C, Aschemann H, aus der Wiesche S, Hofer EP, Debéda H, Mohr J, Wallrabe U
  Testing and Improvement of Micro-Optical-Switch Dynamics,
  2001 Microelectron Reliab, volume: 41, pages: 471 - 480

2000

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• Th. Kunz, J. Mohr, A. Ruzzu, K. D. Skrobanek, U. Wallrabe
  Adhesion of Ni-structures on Al2O3 ceramic substrates used for the sacrificial layer technique
  2000 Microsystem Technologies, volume: 6, pages: 121 - 125

1999

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• H. Debéda, T.v. Freyhold, J. Mohr, U. Wallrabe, J. Wengelink
  Developoment of miniaturized piezoelectric actuators for optical applications realized using LIGA technology
  1999 J Microelectromech S, volume: 8, issue: 3, pages: 258 - 263
• V.D. Samper, A.J. Sangster, R.L. Reuben, U. Wallrabe
  Torque evaluation of a LIGA fabricated electrostatic micromotor
  1999 J Microelectromech S, volume: 8, issue: 1, pages: 115 - 123

1998

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• V.D. Samper, A. J. Sangster, U. Wallrabe, R. L. Reuben, J. K. Grund
  Advanced LIGA technology for the integration of an electrostatically controlled bearing in a wobble micromotor
  1998 J Microelectromech S, volume: 7, issue: 4, pages: 423 - 427
• U. Wallrabe, R. Ruther, T. Schaller, W. K. Schomburg
  Microsystems in Medicine
  1998 Int. Journal of Artifical Organs, volume: 21, issue: 3, pages: 137 - 146
• V.D. Samper, A. J. Sangster, R. L. Reuben, U. Wallrabe
  Multistator LIGA fabricated electrostatic wobble motors with integrated synchronous control.
  1998 J Microelectromech S, volume: 7, issue: 2, pages: 214 - 223

1996

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• D. Mathieson, U. Beerschwinger, S. J. Yang, R. L. Reuben, M. Taghizadeh, S. Eckert, U. Wallrabe
  Effect of progressive wear on the friction characteristics of nickel LIGA processed rotors
  1996 Wear, volume: 192, pages: 199 - 207
• T. Bieger, U. Wallrabe
  Tribological investigation of LIGA-microstructures
  1996 Microsyst Technol, volume: 2, pages: 63 - 70

1994

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• U. Wallrabe, P. Bley, B. Krevet, W. Menz, J. Mohr
  Design rules and test of electrostatic micromotors made by the LIGA process
  1994 J Micromech Microeng, volume: 4, pages: 40 - 45
• U. Beerschwinger, S. J. Yang, R. L. Reuben, M. Taghizadeh, S. Eckert, U. Wallrabe
  Friction measurements of LIGA-processed microstructures
  1994 J Micromech Microeng, volume: 4, pages: 14 - 22

1992

 back to the year overview

• M. Himmelhaus, P. Bley, J. Mohr, U. Wallrabe
  Integrated measuring system for the detection of the number of revolutions of LIGA microturbines in view of a volumetric flow sensor
  1992 J Micromech Microeng, volume: 2, pages: 196 - 198
• J. Mohr, P. Bley, M. Strohrmann, U. Wallrabe
  Microactuators fabricated by the LIGA process
  1992 J Micromech Microeng, volume: 2, pages: 234 - 241

Books

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2013

 back to the year overview

• Der Andere Verlag
  Towards high performing resonant electrodynamic vibration energy harvesters
  Clemens Cepnik

2011

 back to the year overview

• Der Andere Verlag
  Minimalistic adaptive lenses
  Jan Draheim

2010

 back to the year overview

• Der Andere Verlag
  Elektromagnetische Energiewandler mit dem Potential zur großflächigen Anwendung
  Benjamin Mack
• Der Andere Verlag
  Microcoils manufactured with a wire bonder
  Kai Kratt

2009

 back to the year overview

• Der Andere Verlag, page: 190
  Adaptive Silikon-Membranlinsen mit integriertem Piezo-Aktor,
  ISBN: 978-3-89959-859-9
  F. Schneider
  » show abstract« hide abstract
  Abstract

  Autofokussysteme sind selbstverständlicher Bestandteil in zahlreichen Anwendungen, wie automatischen Identifikationssystemen, Koordinatenmessgeräten, vollautomatischen Mikroskopen sowie in medizinischen Endoskopen. In der Regel wird die Brennweite in solchen Autofokussystemen durch eine Variation des Abstandes von zwei oder mehreren Linsen geregelt. Dabei ist die mechanisch genaue Positionierung der Linsen sehr aufwändig und somit kostspielig. Alternativ dazu wird in dieser Arbeit zur Reduktion der Herstellungskosten die erste adaptive Silikon-Membranlinse mit integriertem piezoelektrischem Pumpaktor vorgestellt. Das opto-mechanische System besteht im Wesentlichen aus zwei Komponenten; einer Linse und einem Pumpaktor, welche auf einem Glassubstrat miteinander verbunden sind. Untersucht wird der Einfluss der Linsenorientierung, der Linsenbrennweite sowie der Membrandicke und Membranform auf die optische Linsenqualität. Die Optimierung des Pumpaktors wird durch die Variation der Kammer- sowie der Biegewandlergeometrie durchgeführt. Zur Untersuchung des Gesamtsystems wird das spannungs- und zeitabhängige Brechkraftverhalten, die elektrische Leistungsaufnahme sowie die Langzeitstabilität analysiert.
• Der Andere Verlag
  Electromagnetic comb-drives
  Stefan Schonhardt
• Der Andere Verlag
  Synthesis of compliant single crystal silicon mechanisms with large deformation
  Tzung-Ming Chen

Book chapters

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2017

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• K.V. Poletkin, V. Badilita, Z. Lu, U. Wallrabe, C. Shearwood
  Micro-machined inductive contactless suspension: Technology and Modelling
  In: Magnetic Sensors: Technologies and Applications
  2017, CRC Press, L. Francis, K.V. Poletkin, K. Iniewsk, ieds., L. Francis, K.V. Poletkin, K. Iniewsk, ieds., ISBN: 978-1-498-71097-8

2016

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• U. Wallrabe, M. Stürmer, E. Förster, R. Brunner
  Hyperspectral eye
  In: Tunable Micro-optics
  2016, Cambridge University Press, Hans Zappe, Claudia Duppé, eds., pages: 395 - 416, Hans Zappe, Claudia Duppé, eds., ISBN: 978-1-107-03245-3
• J. Draheim, U. Wallrabe
  Piezoelectrically actuated tunable microlenses1
  In: Tunable Micro-optics
  2016, Cambridge University Press, Hans Zappe, Claudia Duppé, eds., pages: 241 - 261, Hans Zappe, Claudia Duppé, eds., ISBN: 978-1-107-03245-3

2014

 back to the year overview

• Poletkin, K. V., Shearwood, C., Chernomorsky, A. I., Wallrabe, U.
  Micromachined contactless suspensions
  In: Technologies for Smart Sensors and Sensor Fusion
  2014, CRC Press, K. Yallup und K. Iniewski, pages: 211 - 235, K. Yallup und K. Iniewski, ISBN: 9781466595507

2013

 back to the year overview

• K. Poletkin, C. Shearwood, A.I. Chernomorsky, U. Wallrabe
  Micromachined contactless suspensions
  In: Technologies for Smart Sensors and Sensor Fusion
  2013, CRC Press, K. Yallup and K. Iniewsky, K. Yallup and K. Iniewsky, ISBN: 9781466595507

2008

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• U. Gengenbach, I. Sieber, U. Wallrabe
  Design for LIGA and safe manufacturing
  In: Advanced Micro and Nanosystems
  2008, Wiley-VCH, V. Saile, U. Wallrabe, O. Tabata, J. G. Korvink (Vol. eds), O. Brand, G. Fedder, C. Hierold, J.G. Korvink, O. Tabata (Eds.), pages: 143 - 188, V. Saile, U. Wallrabe, O. Tabata, J. G. Korvink (Vol. eds), O. Brand, G. Fedder, C. Hierold, J.G. Korvink, O. Tabata (Eds.), ISBN: 978-3-527-31698-4
• V. Saile, U. Wallrabe, O. Tabata, J. G. Korvink
  LIGA and its applications
  In: Advanced Micro and Nanosystems
  2008, Wiley-CH, pages: 143 - 188, ISBN: 978-3-527-31698-4
• U. Wallrabe, J. G. Korvink, J. Mohr
  Materials, Fabrication and Packaging, Electronics and System Design
  In: LIGA. Comprehensive Microsystems
  2008, Elsevier, Y.B. Gainchandani, O. Tabata, H. Zappe, pages: 292 - 340, Y.B. Gainchandani, O. Tabata, H. Zappe,

2005

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• Wallrabe U, Saile V
  LIGA Technology for R&D and Industrial Applications,
  In: MEMS: A Practical Guide to Design, Analysis, and Applications
  2005, William Andrew, Inc. & Springer, J. Korvink, O. Paul, pages: 853 - 899, J. Korvink, O. Paul,

2004

 back to the year overview

• Mohr J, Last A, Wallrabe U
  Modular Fabrication Concept for LIGA based Microoptics,
  In: Microoptics - From Technology to Applications
  2004, Springer Series in Optical Sciences, J. Jahns, K.-H. Brenner, pages: 115 - 126, J. Jahns, K.-H. Brenner,

2003

 back to the year overview

• Wallrabe U, Mohr J
  Modular Microoptical Systems for Sensors and Telecommunication,
  In: Sensors Update Vol. 12
  2003, Wiley-VCH, H. Baltes, J. Korvink, G. Fedder, pages: 143 - 174, H. Baltes, J. Korvink, G. Fedder,

Talks

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2017

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• Lemke F, Weirich C, Philipp K, Kouourakis N, Czarske J, Wallrabe U, Wapler M
  Adaptive piezogetriebene Hochgeschwindigkeits-Linse mit asphärischer Korrektur
  2017 DGAO Jahrestagung 2017
• U. Wallrabe
  Nicht-sphärische adaptive Optik für die Lebenswissenschaften
  2017 DGAO Tagung Dresden, Germany
• Wapler M, Testud F, Hucker P, Spengler N, Zaitsev M, Wallrabe U
  Simultane Kernspin- und optische Mikroskopie mit adaptiven Linsen
  2017 DGAO Jahrestagung 2017

2016

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• U. Wallrabe, A. Müller, M. Reisacher, O. Ambacher, K. Holc, M.C. Wapler
  Controlling Bessel beams for optophysiology
  2016 BMT Dreiländer Jahrestagung der Medizinischen Gesellschaft, Basel, Schweiz
• U. Wallrabe, M. Stürmer, R. Brunner, E. Förster, J.G. Korvink, M. Abdo, M. Zaitsev, F. Testud, F. Lemke, M.C. Wapler
  Piezo actuated adaptive lenses
  2016 ISOT, Int. Symposium of Optomechatronics Technology, Tokyo, Japan

2015

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• Wapler M, Testud F, Spengler N, Zaitsev M, Wallrabe U
  An MR-Compatible Microscope for Simultaneous Dual-Mode Optical and MR Micros-copy
  2015 Experimental Nuclear Magnetic Resonance Conference 2015, Contribution 262
• Wapler M, Testud F, Spengler N, Zaitsev M, Wallrabe U
  “Concurrent Optical and Magnetic Resonance Microscopy”,
  2015 International Conference on Magnetic Resonance Microscopy 2015: Contribution A-205

2012

 back to the year overview

• Wallrabe, Ulrike
  "Trends in microactuators - attacking the compromises"
  2012 Actuators 2012 Bremen
• Michael Pauls
  A reflective tunable blazed-grating for high energy femtosecon laser pulses
  2012 ISOT 12, Paris, Frankreich
• Vlad Badilita
  Wirebonded Microcoils for Microscale Magnetic Resonance-Based Detection
  2012 Romanian Research in Diaspora, Bukarest

Conference papers

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2020

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• M. Liebmann, A. Treffer, M. Bock, U. Wallrabe, R. Grunwald
  Controlling the spectral rotation of ultra-short vortex pulses
  2020 SPIE OPTO 2020, San Francisco, CA, USA , volume: 112970W

2019

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• A. Müller, M.C. Wapler, U. Wallrabe
  Economical rapid-prototyping of aspherical lenses
  2019 EOS World of Photonics Congress 2019, Munich, Germany PJ Web of Conferences, volume: 215, issue: 04001
• A. Müller, M.C. Wapler, U. Wallrabe
  Economical rapid-prototyping of aspherical lenses
  2019 EOS World of Photonics congress 2019, Munich, Germany PJ Web of Conferences, volume: 215, issue: 04001
• H.G.B. Gowda, U. Wallrabe
  Integrated Sensor System to Control the Temperature Effects and the Hysteresis on Adaptive Fluid-membrane Piezoelectric lenses
  2019 ISOT 2019, 20th Int. Symposium of Optomechatronics Technology, Goa, India
• H.G.B. Gowda, U. Wallrabe,
  Integrated sensor system to control the temperature effects and the hysteresis on adaptive fluid-membrane piezoelectric lenses
  2019 ISOT 2019, 20th Int. Symposium of Optomechatronics Technology, Goa, India
• A. Müller, M.C. Wapler, U. Wallrabe
  Micro-optical System for depth-controlled Bessel beam arrays
  2019 Int. Conference on Optical MEMS and Nanophotonics, Daejeon, Korea , pages: 184 - 185
• A. Müller, M.C. Wapler, U. Wallrabe
  Micro-optical system for depth-controlled Bessel beam arrays
  2019 Int. Conf. on Optical MEMS and Nanophotonics (OMN) 2019, Daejeon, Korea , pages: 184 - 185
• F. Lemke, P.M. Weber, U. Wallrabe, M.C. Wapler
  Miniaturized piezo-actuated adaptive prism for biaxial optical scanning
  2019 Int. Conference on Optical MEMS and Nanophotonics 2019, Daejeon, Korea , pages: 222 - 223
• F. Lemke, P.M. Weber, U. Wallrabe, M.C. Wapler
  Miniaturized piezo-actuated adaptive prism for biaxial optical scanning
  2019 Int. Conf. on Optical MEMS and Nanophotonics (OMN) 2019, Daejeon, Korea , pages: 222 - 223
• B. Kar, U. Wallrabe
  Performance enhancement of an ultrasonic power transfer system through a tightly coupled solid media using a KLM model.
  2019 Power MEMS 2019, Krakow, Poland
• A. Müller, M.C. Wapler, U. Wallrabe
  Rapid-Prototyping Prozess für stark asphärische Mikrolinsen-Arrays.
  2019 Mikrosystemtechnikkongress 2019 Berlin, Germany VDE-Verlag 2019, pages: 88 - 91
• A. Müller, M.C. Wapler, U. Wallrabe
  Rapid-Prototyping Prozess für stark asphärische Mikrolinsen-Arrays.
  2019 Mikrosystemtechnikkongress 2019, Berlin, Germany VDE-Verlag Berlin, pages: 88 - 91
• B.P. Bruno, A. Treffer, R. Grunwald, U. Wallrabe
  Thermally actuated free-form MEMS mirrors
  2019 Int. Conference on Optical MEMS and Nanophotonics 2019, Daejeon, Korea , pages: 82 - 83
• B.P. Bruno, A. Treffer, R. Grunwald, U. Wallrabe
  Thermally actuated free-form MEMS mirrows
  2019 Int. Conf. on Optical MEMS and Nanophotonics (OMN) 2019, Daejeon, Korea , pages: 82 - 83
• M.C. Wapler, U. Wallrabe
  Ultrafast and compact varifocal lens
  2019 IEEE MEMS 2019, Seoul ,Korea IEEE Micro Electro Mechanical Systems, pages: 938 - 941
• M.C. Wapler, U. Wallrabe
  Ultrafast and compact varifocal lens.
  2019 IEEE MicroElectro Mechanicals Systems, MEMS 2019, Seoul, Korea 2019 , pages: 938 - 941
• M.C. Wapler, U. Wallrabe
  Ultraschnelle und ultrakompakte adaptive Linse
  2019 Mikrosystemtechnikkongress 2019 ,Berlin, Germany VDE Verlag Berlin, pages: 186 - 188
• M.C. Wapler, U. Wallrabe
  Ultraschnelle und ultrakompakte adaptive Linse
  2019 Mikrosystemtechnikkongress 2019, Berlin, Germany VDE-Verlag Berlin, pages: 186 - 188

2018

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• Bruno B, Fahmy A, Stürmer M, Wallrabe U, Wapler M
  Characterizing Piezoceramic Materials in High Electric Field Actuator Applications
  2018 ACTUATOR 2018, 16th Int. Conference on New Actuators, Bremen, Germany , pages: 416 - 419
• B.P. Bruno, R. Grunwald, U. Wallrabe
  Fabrication of an adaptive micro Fresnel-mirror array
  2018 ISOT 2018 Int. Symposium of Optomechatronics Technology, Cancún, Mexico Springer Proceedings in Physics, volume: 233, pages: 29 - 35
• B.P. Bruno, R. Grunwald, U. Wallrabe
  Fabrication of an adaptive micro Fresnel-mirror array
  2018 ISOT 2018, 19th Int. Symposium of Optomechatronics Technology, Cancun, Mexico Springer Proceedings in Physics, volume: 233, pages: 29 - 35
• F. Lemke, P.M. Weber, U. Wallrabe, M.C. Wapler
  Piezo actuated adaptive prisms for optical scanning
  2018 ISOT 2018, 19th Int. Symposium of Optomechatronics Technology, Cancun, Mexico Springer Proceedings in Physics, volume: 233, pages: 85 - 91
• F. Lemke, P.M. Weber, U. Wallrabe, M.C. Wapler
  Piezo actuated adaptive prisms for optical scanning
  2018 ISOT 2018, Int. Symposium of Optomechatronics Technology, Cancún.Mexico, 2018 Springer Proceedings in Physics, volume: 233, pages: 85 - 91
• F. Lemke, M. Stürmer, U. Wallrabe, M.C. Wapler
  Pre-stressed Piezo Bending-buckling Actuators for Adaptive Lenses
  2018 ACTUATOR 2018, 16th Int. Conference on New Actuators, Bremen, Germany , pages: 450 - 453
• F. Lemke, Y. Frey, U. Wallrabe, M.C. Wapler
  Pre-stressed piezo bending-buckling actuators for adaptive lenses
  2018 ACTUATOR 2018, 16th Int. Conference on New Actuators, Bremen, 2018 , pages: 450 - 453

2017

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• K.V. Poletkin, Z. Lu, A. Moazenzadeh, S.G. Mariappan, J.G. Korvink, U. Wallrabe, V. Badilita
  3D micro-machined inductive suspensions with the lowest energy consumption.
  2017 Mikrosystemtechnik Kongress München, Germany , pages: 500 - 502
• B.P. Bruno, M. Stürmer, R. Grunwald, U. Wallrabe
  A piezoelectrically tunable Fresnel mirror array
  2017 Micromechanics Europe, Uppsala, Sweden
• K.V. Poletkin, Z. Lu, U. Wallrabe, J.G. Korvink, V. Badilita
  A qualitative technique to study stability and dynamics of micro-machines inductive contactless suspensions.
  2017 TRANSDUCERS, Kaohsiung, Taiwan , pages: 528 - 531
• T. Hehn, M. Stürmer, J. Merz, D. Mintenbeck, U. Wallrabe, Y. Manoli
  Adaptive Linse mit energieeffizienter Treibertechnik
  2017 Mikrosystemtechnik Kongress München, Germany , pages: 352 - 355
• M.C. Wapler, F. Lemke, G. Alia, U. Wallrabe
  Adaptive Spiegel mit asphärischer Korrektur für Miniatur-Spiegel-Linsenobjektive mit langer Brennweite.
  2017 Mikrosystemtechnik Kongress München, Germany , pages: 809 - 812
• N. Koukourakis, K. Philipp, F. Lemke, M. Stürmer, M. Wapler, U. Wallrabe, J. Czarske
  Adaptive lenses for axial scanning in HiLo microscopy
  2017 OSA Photonics Congress: Optics in the Life Sciences, San Diego, CA, USA , volume: BoTu1A.2
• A. Treffer, M. Bock, U. Wallrabe, R. Grunwald
  Array-specific propagation of flexibly structured ultrashort-pulses
  2017 SPIE Photonic West, San Francisco, Ca, USA Complex light and optical forces XI, volume: 10120, issue: 101200S
• M.C. Wapler, F. Lemke, G. Alia, U. Wallrabe
  Aspherical high-speed varifocal mirror for catadioptric miniature telephoto optic
  2017 SPIE EOS Optical Technologies, 5th Conf. on Manufacturing of Optical Systems, Munich
• M. Abdo, E. Förster, P. Bohnert, M. Stürmer, V. Badilita, R. Brunner, U. Wallrabe, J.G. Korvink
  Automatic corrections of diffraction pattern shift in a pushbroom hyperspectral imager with a piezoelectric internal line-scanning unit
  2017 SPIE Photonic West, San Francisco, CA, USA Photonic Instrumentation Engineering IV, volume: 10110, issue: 101104
• K.V. Poletkin, Z. Lu, A. Moazenzadeh, S.G. Mariappan, J.G. Korvink, U. Wallrabe, V. Badilita
  Energy-aware 3D micro-machined inductive suspensions with polymer magnetic composite core
  2017 Power MEMS, Kanazawa, Japan , pages: 150 - 153
• F. Suárez Sandoval, S.M. Torres Delgado, A. Moazenzadeh, U. Wallrabe
  Flexible wireless power transfer system based on closed-loop magnetoinductive waveguides: solution to misaligned and rotational systems
  2017 Power MEMS, Kanazawa, Japan , pages: 342 - 346
• S. Bär, T. Oerther, A. Müller, M. Weigel, M.C. Wapler, J. Leupold
  Ingredients for balanced SSFP Microimaging
  2017 Int. Society for Magnetic Resonance in Medicine (ISMRM, Honolulu, Hawaii, USA
• M. Gorostiaga, M.C. Wapler, U. Wallrabe
  Less gives more: On the optimal filling fraction of piezoelectric acoustic power receivers
  2017 Power MEMS, Kanazawa, Japan , pages: 146 - 149
• F. Suárez Sandoval, A. Moazenzadeh, U. Wallrabe
  Magnetoinductive waves for wireless power transfer: challenges and Solutions.
  2017 Mikrosystemtechnik Kongress München, Germany , pages: 560 - 563
• A. Müller, M.C. Wapler, P. Vaity, M. Reisacher, O. Ambacher, S. Okujeni, U. Egert, M. Bartos, I. Diester, U. Wallrabe
  Non-diffracting light beams for optogenetics
  2017 BrainLinks BrainTools International Conference, Freiburg, 2017
• M. Gorostiaga, M.C. Wapler, U. Wallrabe
  On the optimal electric load for ultrasound energy receivers
  2017 IEEE International Symposium on the Applications of Ferroelectric (ISAF), Atlanta, USA IEEE, pages: 37 - 40
• M. Stürmer, M.C. Wapler, U. Wallrabe
  Robuste adaptive Linsen mit Silikon- und Glasmembranen
  2017 Mikrosystemtechnik Kongress München, Germany , pages: 805 - 808
• K. Philipp, F. Lemke, M.C. Wapler, U. Wallrabe, N. Koukourakis, J. Czarske
  Spherical aberration correction of adaptive lenses
  2017 SPIE Photonics West, San Francisco, Ca, USA Adaptive optics and Wavefront control for biological Systems III, volume: 10073, issue: 1007303
• A. Müller, M.C. Wapler, U. Wallrabe
  Steuerbare Ringblenden für segmentierte Besselstrahlen.
  2017 Mikrosystemtechnik Kongress München, Germany , pages: 128 - 130
• A. Müller, M.C. Wapler, M. Reisacher, O. Ambacher, U. Wallrabe
  Tiefenkontrollierbare Bessel-Strahlen für quasi-nichtinvasive optogenetische Stimulation
  2017 118. Jahrestagung d. Deutschen Gesellschaft für angewandte Optik, Dresden, Germany

2016

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• A. Müller, M. C. Wapler, U. Wallrabe
  "Depth-controlled Bessel beams"
  2016 2016 Interntional Conference on Optical MEMS and Nanophotonics (OMN), Singapur , pages: 243 - 244
• A. Müller, M. C. Wapler, M. Reisacher, K. Holc, O. Ambacher, U. Wallrabe
  Bessel beams for depth-controlled quasi-noninvasive optogenetic stimulation
  2016 3rd Int. Worhshop on Technologies for Optogenetics (OPTOGEN), Freiburg 2016
• F. Suárez Sandoval, A. Moazenzadeh, S. M. Torres Delgado, U. Wallrabe
  Double-spiral coils and live impedance modulation for efficient wireless power transfer via magnetoinductive waves
  2016 IEEE Wireless Power Transfer Conference, WPTC, Aveiro, Portugal , pages: 1 - 4
• K. Philipp, A. Smolarski, A. fischer, N. Koukourakis, M. Stürmer, U. Wallrabe, J. Czarske
  High-contrast 3D Image asquisition using HiLo microscopywith an electrically tunbable lens
  2016 SPIE Photonics Europe, Brussels, Belgium , volume: 9890, issue: 98900A
• M. Stuermer, M. C. Wapler, U. Wallrabe
  Optical amplitude gratings with tunable diffraction efficiency
  2016 2016 Int. Conference on Optical MEMS and Nanophotonics, Singapore
• M. Gorostiaga, M. C. Wapler, U. Wallrabe
  Optimal electric load prediction from the KLM model for ultrasound energy receivers
  2016 IEEE Int. Ultrasonics Symposium, Tours, France
• M. Stuermer, M. C. Wapler, U. Wallrabe
  Single-sided contacting of out-of-plane polarized piezo films for fluid membrane lenses
  2016 Actuator 2016, 15th Int. Conference on New Actuators, Bremen, Germany , pages: 65 - 68
• F. Lemke, M. Stürmer, U. Wallrabe, M.C. Wapler
  Topological in-plane polarized piezo actuation for compact adaptive lenses with aspherical correction.
  2016 ACTUATOR 2016, 15th Int. Conference on New Actuators, Bremen, Germany , pages: 228 - 231
• F. Barz, R. Lausecker, U. Wallrabe, P. Ruther, O. Paul
  Wafer-level shellac-based interconnection process for ultrathin silicon chips of arbitrary shape
  2016 IEEE Micro Electro Mechanical Systems MEMS 2016, Shanghai, China , pages: 520 - 523

2015

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• Wallrabe U
  Axicons et al. – highly apsherical adaptive optical elements for the life sciences
  2015 Transducers 2015 IEEE, volume: 2015, pages: 251 - 256
  » show abstract« hide abstract
  Abstract

  This paper summarizes the recent research on tunable aspherical micro optics in regard to applications in the life sciences. Particular emphasis is placed on adaptive lenses and a very special class among them, conical lenses, so-called axicons. While various mechanisms to tune the asphericity are reviewed, the focus of the discussion is placed on piezo¬electric actuation because of its speed and thermal actuation because of its design freedom. The major appli¬cations in life sciences are microscopy, cell handling, and neurosciences. Possible further applications are referred to as well.
• U. Wallrabe, J. Brunne, A. Treffer, R. Grundwald
  Adaptive micro axicons for laser applications
  2015 ISOT 2015, Int. Symposium of Optomechatronics Technology, Neuchatel, Schweiz
• U. Wallrabe
  Axicons et. al - Highly aspherical adaptive optical elements for the life sciences
  2015 TRANSCUCERS 2015, Anchorage, AL, USA , pages: 251 - 256
• K. V. Poletkin, Z. Lu, U. Wallrabe, V. Badilita
  Hybrid electromagnetic and electrostatic micromachined suspension with adjustable dynamics
  2015 Power Mems 2015, Boston, MA, USA
• Moazenzadeh, A., Suarez Sandoval, F., Spengler, N., Wallrabe, U.
  Microtransformers on 3D closed-loop cores made of amorphous magnetic alloys
  2015 18th Transducers 2015, Anchorage, Alaska, USA IEEE, pages: 602 - 605
• M. Gorostiaga, M.C. Wapler, U. Wallrabe
  Novel spring-mass matching layer fabrication
  2015 IEEE International Ultrasonics Symposium (IUS), Teipei, Taiwan 2015 IEEE International Ultrasonics Symposium (IUS)
• Wapler MC, Weirich C, Stürmer M, Wallrabe U
  ULTRA-COMPACT, LARGE-APERTURE SOLID STATE ADAPTIVE LENS WITH ASPHERICAL CORRECTION
  2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), IEEE, volume: 2015
• Wapler M, Weirich C, Stürmer M, Wallrabe U
  Ultra-kompakte adaptive Hochgeschwindigkeitslinsen mit großer Apertur und asphärischer Korrektur
  2015 MikroSystemTechnik Kongress 2015, Karlsruhe MikroSystemTechnik Kongress 2015, VDE, pages: 66 - 69

2014

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• Wapler MC, Stürmer M, Wallrabe U
  A Compact, Large-Aperture Tunable Lens with Adaptive Spherical Correction
  2014 2014 International Symposium on Optomechatronic Technologies (ISOT), IEEE
• Wapler M, Stürmer M, Wallrabe U
  A compact, large-aperture tunable lens with adaptive spherical correction
  2014 , pages: 130 - 133
  » show abstract« hide abstract
  Abstract

  IEEE 2014 International Symposium on Optomechatronic Technologies (ISOT 2014)
• Moritz Stürmer, Andreas Schatz, Ulrike Wallrabe
  Cylindrical lens with integrated piezo actuation for focal length Tuning and lateral scanning
  2014 IEEE Int. Conf . on Micro Electro Mechanical Systems, San Francisco, CA, USA , pages: 1171 - 1174
• R. Grunwald, M. Bock, J. Brunne, U. Wallrabe
  Few-cycle vortex wavepackets with tunable topological charge
  2014 SPIE 8999, Photonics West, San Francisco, USA , volume: 8999, issue: 57
• Holc, K., Jakob, A., Weig, T., Köhler, K., Schwarz, U.T., Müller, A., Pauls, M., Wapler, M., Wallrabe, U., Ambacher, O.
  New tools for optogenectics: Nitride laser diodes combined with axicons for non-invasive neuronal stimulation"
  2014 Proceed. of the Int. Workshop on Nitirde Semiconductors, Wroclaw,Poland
• Poletkin, K.V., Lu, Z., den Hartogh, B., Wallrabe, U., Badilita, V.
  Stability and spring constant investigation for micromachined inductive suspensions: theoretical analysis vs. experimental results.
  2014 2014 Power MEMS, Hyogo, Japan Journal of Physics: Conference Series, volume: 557, supplement: 012133
• Ali Moazenzadeh, Nils Spengler, Vlad Badilita, Jan G. Korvink
  Wire bonded MEMS-scale on-chip transformers
  2014 Applied Power Electronics Conference and Exposition (APEC), Fort Worth, TX, USA , pages: 752 - 756

2013

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• Poletkin, K.V., Chernomorsky, A. I., Shearwood, C., Wallrabe, U.
  An Analytical Model of Micromachined Electromagnetic Inductive Contactless Suspension
  2013 ASME and IMECE 2013, San Diego, California, USA
• Markus V. Meissner, Robert Ch. Meier, Pter T. While, Ali Moazenzadeh, Jan G. Korvink
  Micro Magnetic Resonance x, y-Gradient Systems for Microscopic Samples
  2013 ISMRM 21st Annual Meeting & Exhibition, Salt Lake City, UTAH, USA
• A. Treffer, S.K. Das, H. Messaoudi, J. Brunne, U. Wallrabe, R. Grunwald
  Adaptive Generation of laser induced periodic structures with MEMS axicons
  2013 PIERS Progress in Electromagnetics Research Symposium, Special Session SC3&2, Stockholm, Sweden , page: 1391
• M. Bock, J. Brunne, A. Treffer, S. König, U. Wallrabe, R. Grunwald
  Adaptive spiral phase elements for the generation of few-cycle vortex pulses
  2013 CLEO / EUROPE - IQEC, Munich, Germany
• K. Poletkin, A.I. Chernomorsky, C. Shearwood, U. Wallrabe
  An analytical model of micromachined electromagnetic inductive contactless suspension
  2013 Int. Mechanical Engineering Congress & Exposition (IMECE2013), San Diego, California, USA
• Moritz Stürmer, Matthias C. Wapler, Jens Brunne, Ulrike Wallrabe
  Focusing mirror with tunable eccentricity
  2013 Optical MEMS & Nanophotonics, Kanazawa, JAPAN , pages: 159 - 160
• Matthias C Wapler, Jens Brunne, Ulrike Wallrabe
  Freeform high-speed large-amplitude deformable piezo mirrors
  2013 IEEE Conf. on Optical MEMS and Nanophotonics, Kanazawa, JAPAN , pages: 157 - 158
• Matthias C. Wapler, Jens Brunne, Ulrike Wallrabe
  Freeform single layer bending actuators: new design freedom for piezo actuators
  2013 MST-Kongress, Aachen
• Ali Moazenzadeh, Nils Spengler, Ulrike Wallrabe
  High-Performance, 3D-microtransformers on multilayered magnetic cores
  2013 26th IEEE Int. Conf. on Micro Electro Mechanical Systems, Taipei , pages: 287 - 290
• A. Treffer, S.K. Das, M. Bock, J. Brunne, U. Wallrabe, R. Grunwald
  MEMS axicons for nondiffracting line shaping of ultrashort pulses
  2013 Proc. SPIE 8637, Complex Light and Optical Forces VII
• N. Spengler, R. Ch. Meier, A. Moazenzadeh, V. Badilita, J. G. Korvink, U. Wallrabe
  Micro-NMR probe featuring disposable, self-priming sample-inserts, towards high-throughput profiling
  2013 TRANSDUCERS 2013, Barcelona, Spain , pages: 2118 - 2121
• Spengler, N., Meier, R., Moazenzadeh, A., Badilita, V., Korvink, J.G., Wallrabe, U.
  Mikro-Helmholtzspule mit austauschbaren, mikrofluidischen Probenbehältern für MRT-Mikroskopie und -Spektroskopie
  2013 MST-Kongress, Aachen, Deutschland VDE Verlag GmbH, pages: 241 - 244
• N. Spengler, R.Ch. Meier, A. Moazenzadeh, V. Badilita, J. G. Korvink, U. Wallrabe
  Multi-use wirebonded Helmholtz probe for nuclear magnetic resonance microscopy and spectroscopy
  2013 Int. Conf. on Microtechnogoies in Medicine and Biologym Marina del Rey, CA, USA , pages: 76 - 77
• Moritz Stürmer, Matthias C. Wapler, Jens Brunne, Ulrike Wallrabe
  Vom Sattel bis zur Sphäre: Piezobiegeaktoren mit variabler Oberflächenkrümmung
  2013 Mikrosystemtechnikkongress, Aachen, Deutschland , pages: 55 - 58
  
   
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• A. Moazenzadeh, N. Spengler, J. G. Korvink, U. Wallrabe
  Wire bonder made on-chip microtransformers for very high frequency (VHF) regime applications
  2013 MST-Kongress, Aachen, Germany , pages: 737 - 740
• N. Spengler, R. Ch. Meier, A. Moazenzadeh, V. Badilita, J. G. Krovink, U. Wallrabe
  µHelmholtz-probe featuring disposable, self-priming sample inserts for sterile, high throughput screening of volume-limited samples
  2013 ENC Conference, Pacific Grove, CA, USA , pages: 14 - 19

2012

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• Pauls, M., Brunne, J., Wallrabe, U., Grunwald, R.
  A reflective tunable blazed-grating for high energy femtosecond laser pulses
  2012 Optomechatronic Technologies (ISOT), Stockholm, Sweden , issue: 1, supplement: 2, pages: 29 - 31
• Brunne, J., Wapler, M., Wallrabe, U., Treffer, A., Bock, M., Grunwald, R.
  Adaptive Fresnel mirror for ultrashort-pulse laser beam shaping
  2012 Optomechatronic Technologies (ISOT), Stockholm, Sweden , issue: 1, supplement: 2, pages: 29 - 31
• A. Treffer, J. Brunne, S.K. Das, M. Bock, H. Messaoudi, U. Wallrabe, R. Grunwald
  Characterization of fast-switching low-dispersion MEMS-based micro-axicons for applications in ultrashort-pulse nanostructuring
  2012 Frühjahrstagung Deutsche Physikalische Gesellschaft Sektion AMOP, Stuttgart, Germany
• Lu, Z., Jia, F., Korvink, J.G., Wallrabe, U., Badilita, V.
  Design optimization of an electromagnetic microlevitation System based on copper wirebonded coils
  2012 Power MEMS, Atlanta, GA, USA , pages: 363 - 366
• Vlad Badilita
  First Microfabricated Inserts for Magic Angle Coil Spinning (MACS) NMR Spectroscopy
  2012 ENC Conference, Miami, Florida PlosOne, volume: 7, issue: (8), supplement: e42848
• Ali Moazenzadeh, Nils Spengler, Ulrike Wallrabe
  On-chip, mems-scale, high-performance, 3D-solenoidal transformers
  2012 Power Mems Atlanta, Georgia, USA

2011

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• K. Kratt, S. Waselikowski, V. Badilita, U. Wallrabe, M. Walther, J. G. Korvink
  3D microcoils as metamaterial with electric and magnetic response
  2011 TRANSDUCERS, Peking, PR China , pages: 2666 - 2669
• V. Badilita, K. Kratt, N. Baxan, J. Anders, D. von Elverfeldt, G. Boero, J. Hennig, J. G. Korvink, U. Wallrabe
  3D solenoidal microcoil arrays with CMOS integrated amplifiers for parallel MR imaging and spectroscopy
  2011 MEMS 2011, Cancún, México Micro Electro Mechanical Systems, IEEE, pages: 809 - 812
• Cepnik C, Wallrabe U
  A micro energy harvester with 3D wirebonded microcoils
  2011 TRANSDUCERS 2011/Peking, PR China IEEE, pages: 665 - 668
• C. Cepnik, U. Wallrabe
  A novel flat high performance micro energy harvester
  2011 TRANSDUCERS, Peking, PR China , pages: 661 - 664
• J. Brunne, M. Bock, A. Treffer, U. Wallrabe, R. Grunwald
  Adaptive generation of Bessel-like beams by reflective multi-electrode piezo-axicons
  2011 CLEO, München , volume: CF_P14
• J. Brunne, M. Bock, A. Treffer, U. Wallrabe, R. Grunwald
  Adaptive generation of Bessel-like beams by reflective multi-electrode piezo-axicons
  2011 CLEO/ EUROPE and EQEC, Munich CLEO / Europe an EQEC Conference Digest, OSA Technical Digest (CD)
• J. Brunne, R. Grunwald, U. Wallrabe
  Adaptive piezoelectric axicon mirrors for high power femtosecond laser applications
  2011 TRANSDUCERS, Peking, PR China , pages: 1558 - 1561
• J. Brunne, R. Grunwald, U. Wallrabe
  Adaptive piezoelektrische Axiconspiegel für ultrakurze Laserpulse
  2011 Mikrosystemtechnikkongress, Darmstadt , issue: 23, pages: 110 - 113
• V. Badilita, S. Rzesnik, K. Kratt, U. Wallrabe
  Characterization of the 2nd generation magnetic microbearing with integrated stabilization for frictionless devices
  2011 TRANSDUCERS, Peking, PR China , pages: 1456 - 1459
• J. Draheim, T. Burger, R. Kamberger, U. Wallrabe
  Closed-loop pressure control of an adaptive single chamber membrane lens with integrated actuation
  2011 Optical MEMS & Nanophotonics, Istanbul , pages: 47 - 48
• O. G. Gruschke, L. Clad, N. Baxan, K. Kratt, M. Mohmmadzadeh, D. von Elverfeldt, A. Peter, J. Hennig, V. Badilita, U. Wallrabe, J.G. Korvink
  Empfangsmikrospulenarray für Magnetresonanztomographie
  2011 Mikrosystemtechnikkongress, Darmstadt , issue: 50, pages: 217 - 220
• J. Brunne, A. Treffer, M. Bock, R. Grunwald, U. Wallrabe
  Fast optical line shaper for ultrashort-pulse laser nanomachining
  2011 Optical MEMS & Nanophotonics, Istanbul, Türkei , pages: 5 - 6
• J. Draheim, T. Burger, F. Schneider, U. Wallrabe
  Fluidic zoom lens system using two single chamber adaptive lenses with integrated actuation
  2011 MEMS 2011, Cancún, México Micro Electro Mechanical Systems, IEEE, pages: 692 - 695
• J. Brunne, S. Kazan, U. Wallrabe
  In-plane DEAP stack actuators for optical MEMS applications
  2011 SPIE ´11, San Diego, CA, USA
• V. Badilita, B. Fassbender, O. Gruschke, K. Kratt, R. Meier, D. Sakellariou, J. G. Korvink, U. Wallrabe
  Inductively coupled wirebonded microcoils for wireless on-chip NMR
  2011 TRANSDUCERS, Peking, PR China , pages: 2798 - 2800
• K. Kratt, B. Bassbender, V. Badilita, D. Sakellariou, J. G. Korvink, U. Wallrabe
  Induktiv gekoppelte RF Resonatoren für drahtlose NMR Analyse
  2011 Mikrosystemtechnikkongress, Darmstadt , issue: 12.3, pages: 984 - 998
• Tsumori, F., Brunne, J.
  Magnetic actuator using interactions between micro magnetic elements
  2011 IEEE MEMS, Cancún, México , pages: 1245 - 1248
• O. Gruschke, L. Clad, N. Baxan, K. Kratt, M. Mohmmadzadeh, D. von Elverfeld, A. Peter, J. Hennig, V. Badilita, U. Wallrabe, J. G. Korvink
  Multilayer phased microcoil array for magnetic resonance imaging
  2011 TRANSDUCERS, Peking, PR China , pages: 962 - 965
• C. Cepnik, O. Radler, S. Rosenbaum, T. Ströhla, U. Wallrabe
  On a novel optimization approach of electromagnetic energy harvesters
  2011 ICMSAO´11, Kuala Lumpur, Malaysia , pages: 1097 - 1102
• C. Cepnik, U. Wallrabe
  On the comparison, scaling and benchmarking of electromagnetic vibration harvesters
  2011 Power Mems, Seoul, Korea , pages: 70 - 73
• D. Strohmeier, J. Draheim, M. Domaszewski, A. Greiner, U. Wallrabe, J. G. Korvink
  Particle swarm optimization on a new parametric model of a deformable membrane lens.
  2011 Optical MEMS & Nanophotonics, Istanbul, Türkei , pages: 201 - 202
• T. M. Chen, J. Brunne, U. Wallrabe
  SOI Process and Stability Measurement of SCS Scanning Micromirror
  2011 HARMST, Hsinchu, Taiwan
• V. Badilita, B. Fassbender, K. Kratt, R. Meier, D. Sakellariou, J. G. Korvink, U. Wallrabe
  Single chip probe for high resolution magic angle coil spinning NMR of biological samples
  2011 MicroTAS, Seattle, WA , pages: 1314 - 1316
• J. Draheim, T. Burger, U. Wallrabe
  Variable fluidische Blende auf Basis einer adaptiven Linse mit integrierter piezoelektrischer Aktuierung
  2011 Mikrosystemtechnikkongress, Darmstadt , issue: 24, pages: 114 - 117

2010

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• T.-M. Chen, S. Krausse, J. G. Korvink, U. Wallrabe
  12° design rule for single silicon curved beam compliant mechanisms with large deformation
  2010 MEMS Hongkong Micro Electro Mechanical Systems, IEEE, pages: 552 - 555
• F. Schneider, J. Draheim, T. Burger, J. MacLaren, M. Herbst, M. Zaitsev, R. Bammer, U. Wallrabe
  An adaptive objective for optical motion correction in MRI
  2010 Optical MEMS & Nanophotonics 2010, Sapporo, Japan IEEE, pages: 189 - 190
• K. Kratt, E. Fischer, V. Badilita, M. Mohammadzadeh, J. Hennig, J. G. Korvink, U. Wallrabe
  Multi-coil MR imaging with a receive array of eight micro coils,
  2010 ISMRM 2010/ Stockholm, Sweden Proc. ISMRM 2010, page: 3227
• J. Draheim, R. Kamberger, T. Burger, F. Schneider, U. Wallrabe
  Optimierung von piezoelektrischen Pumpaktoren für adaptive Linsen mit großer Apertur
  2010 GMM Workshop Technologien und Werkstoffe der Mikrosystem- und Nanotecnhnik, Darmstadt, Deutschland VDE Verlag GmbH, pages: 91 - 94
• C. Cepnik, U. Wallrabe
  Practical and theoretical limits of the output power of electromagnetic energy harvesters at miniaturization
  2010 Power MEMS 2010, Leuven, Belgium , pages: 69 - 72
• J. Draheim, F. Schneider, T. Burger, R. Kamberger, U. Wallrabe
  Single chamber adaptive membrane lens with integrated actuation
  2010 Photonics Society International Conference on Optical MEMS & Nanophotonics, Sapporo, Japan IEEE, pages: 15 - 16
• R. Ch. Meier, V. Badilita, U. Wallrabe, J.G. Korvink
  Twisted Microfluidics: A novel photoresist lamination process for 3D multilevel lab-on-chip (LOC)applications
  2010 MicroTAS 2010, Groningen, NL , pages: 1145 - 1147

2009

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• V. Badilita, K. Kratt, T. Burger, J. G. Korvink, U. Wallrabe
  3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils,
  2009 Transducers 2009/ Denver, CO, USA/ IEEE Proc. Transducers 2009, IEEE, pages: 1106 - 1109
  » show abstract« hide abstract
  Abstract

  High-aspect-ratio 3D geometrically perfect solenoidal micro-coils are fabricated for the first time in a fully MEMS-integrated technology. Vertical micro-coils with up to 15 windings and diameters down to 100μm have been wound using an automatic wirebonder around SU8 and PMMA cylindrical posts. Using this method we also fabricate Helmholtz micro-coils capable to generate magnetic fields of 1mT, according to simulations. We demonstrate the potential to use large arrays of solenoidal micro-coils for energy harvesting applications by placing them in a sinusoidal magnetic field. The induced voltage is 1.4mV at 300kHz for a 7 windings micro-coil, in agreement with theoretical calculations.
• U. Wallrabe, J. G. Korvink, K. Kratt, V. Badilita, B. Mack
  3D ultra-fast manufactured microcoils on polymer or metal cores,
  2009 Sensors, MEMS and Electro-optic Systems (SMEOS) Conference/ Skukuza, Kruger National Park, South Africa Proc. SMEOS Conference 2009
• K. Land, F. Schneider, J. G. Korvink, V. Badilita
  A microfluidic technique for the capture of biological cells,
  2009 Sensors, MEMS and Electro-optic Systems (SMEOS) Conference/ Skukuza, Kruger National Park, South Africa Proc. SMEOS 2009
• F. Schneider, P. Waibel, U. Wallrabe
  Adaptive silicone-membrane lenses: planar vs. shaped membrane,
  2009 IEEE Conference on Optical MEMS and Nanophotonics/ Clearwater Beach, USA Proc. Conference on Optical MEMS and Nanophotonics 2009, IEEE, pages: 39 - 40
  » show abstract« hide abstract
  Abstract

  We compare the performance and optical quality of two types of adaptive fluidic silicone-membrane lenses. The membranes feature either a homogeneous thickness, or it is shaped resulting in an inhomogeneous cross-section. The lens systems incorporate a piezo actuator which is operated in a regime of plusmn40 V. The shaped membrane lenses show lower wave front errors than the planar ones, down to 24 nm. However, the system with a planar membrane achieves a larger refractive power ranging from +19 to -14 dpt. It also shows a shorter full scale response time (tplanar = 23.9 ms) compared to the shaped membrane (tshaped = 35.4 ms).
• V. Badilita, K. Kratt, N. Baxan, T. Burger, R. Meier, J. Hennig, J. G. Korvink, U. Wallrabe
  Bio-MEMS platform with integrated microfluidics and 3-D micro-coils for parallel magnetic resonance imaging (MRI) at microscale,
  2009 microTAS 2009/ Jeju, Korea/ Proc. microTAS 2009, pages: 1707 - 1709
  » show abstract« hide abstract
  Abstract

  We present for the first time high quality MR images taken with 3D geometrically perfect solenoidal micro-coils fabricated in a fully MEMS-integrated technology. We report MR images with an in-plane resolution of 10x10μm2 and a signal to noise ratio (SNR) – 47 for 5min scan time. MR images are acquired with tranceive micro-coils with 5 windings of insulated 25μm-diameter Au wire and with quality factors (Q) as high as 45. We report a process to integrate the 3D micro-coils into a Bio-MEMS platform for high-throughput cell level MRI by embedding in a polydimethylsiloxane (PDMS) scaffold with microfluidic channels and control valves for parallel probe handling.
• F. Schneider, J. Draheim, P. Waibel, U. Wallrabe
  Characterisation of adaptive fluidic silicone-membrane lenses,
  2009 Sensors, MEMS and Electro-optic Systems (SMEOS) Conference/ Skukuza, Kruger National Park, South Africa Proc. SMEOS Conference 2009, pages: 37 - 41
  » show abstract« hide abstract
  Abstract

  In this paper the auhtors compare the performance and optical quality of two types of adaptive fluidic silicone-membrane lenses. The membranes feature either a homogeneous thickness, or they are shaped resulting in an inhomogeneous cross-section. The lens systems incorporate a piezoelectric actuator which is operated in a regime of ±40 V. The shaped membrane lenses show lower wave front errors than the planar ones, down to 24 nm. The pumping actuator indicates a maximum pump volume of 1159 nl at an inner piezo radius of 2.75 mm for the smallest supporting ring configuration. The full system with a planar membrane achieves a larger refractive power ranging from +19 to -14 dpt. It also shows a shorter full scale response time (tplanar = 23.9 ms) compared to the shaped membrane (tshaped = 35.4 ms).
• V. Badilita, M. Pauls, K. Kratt, U. Wallrabe
  Contactless Magnetic Micro-bearing Based on 3D Solenoidal Micro-coils for Advance PowerMEMS Components,
  2009 PowerMEMS 2009/ Washington DC, USA Proceedings Power MEMS 2009, pages: 87 - 90
• B. Mack, K. Kratt, M. Stürmer, U. Wallrabe
  Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane,
  2009 The 15th International Confernce on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS \& EUROSENSORS/ Denver, CO, USA Proc.Transducers 2009, IEEE, pages: 1397 - 1400
  » show abstract« hide abstract
  Abstract

  This work describes the fabrication and characterization of an electromagnetic micro generator array for energy harvesting purposes. The array consists of a magnetic polydimethylsiloxane (PDMS) membrane with 3x3 magnets which is aligned over a PCB with 3x3 coils. Different coil cores are tested and compared. The parameter for comparison is the voltage induced in the coil array by the vibrating membrane. The maximum measured voltage is 1.2 mV when exciting the converter array with an acceleration of 60 m/s².
• B. Mack, K. Kratt, M. Stürmer, R. Lausecker, U. Wallrabe
  Elektromagnetisches Wandlerarray aus 3D Mikrospulen und einer magnetischen PDMS Membran,
  2009 MST Kongress/ Berlin, Germany Proc. MST Kongress 2009, VDE Verlag
  » show abstract« hide abstract
  Abstract

  Diese Arbeit befasst sich mit einem elektromagnetischen Wandlerarray, welches im Energy Harvesting eingesetzt wird. Es besteht aus einer Polydimethylsiloxan-(PDMS-) Membran, in die 3x3 Permanentmagnete eingegossen sind, und einer Spulenplatte mit 3x3 Spulen. Nach einer Beschreibung der Herstellung erfolgt die Charakterisierung des Array für Spulenplatten mit verschiedenen Kernmaterialien. Als Parameter zum Vergleich dient die vom Wandlerarray gelieferte Induktionsspannung. Bei einer externen Anregung mit einer Beschleunigungsamplitude von 60 m/s2 liefert der Array bis zu 1.2 mV.
• K. Kratt, V. Badilita, T. Burger, J. Mohr, M. Börner, J.G. Korvink, U. Wallrabe
  Herstellung von 3-D Mikrospulen in einem effizienten MST-Prozess,
  2009 MST Kongress/ Berlin, Germany Proc. MST Kongress 2009, VDE Verlag
  » show abstract« hide abstract
  Abstract

  In diesem Artikel stellen wir ein effizientes, teilautomatisiertes und MST-kompatibles Herstellungsverfahren für dreidimensionale Mikrospulen vor. Die Höhe der Spule übersteigt dabei den Durchmesser um ein Vielfaches. Der Durchmesser der Spulen ist bis zu 100 µm klein. Die Spulen werden mit Hilfe eines automatischen Drahtbonders um Pfosten aus SU-8 und PMMA gewickelt. Die Anzahl der Wicklungen hängt dabei nur von der Pfostenhöhe ab. Neben Zylinderspulen wurden mit dem gleichen Verfahren auch Helmholtzspulen hergestellt.
• K. Kratt, V. Badilita, T. Burger, J. Mohr, M. Börner, J. G. Korvink, U.Wallrabe
  High aspect ratio PMMA posts and characterization method for micro coils manufactured with an automatic wire bonder,
  2009 HARMST 2009/ Saskatoon, Canada Proc. HARMST 2009
  » show abstract« hide abstract
  Abstract

  We present the development of high aspect ratio PMMA posts manufactured in deep X-ray lithography technology. The posts serve as support structures for micro coil windings. The coils are wound around these cores by an automatic wire bonder, and they are fully compatible with MEMS processes. Posts with outer diameters down to 100 μm and minimal sidewall thicknesses of 20 μm have an aspect ratio of up 38, leading to single-layer coils with more than 20 windings. With a flexible software, the winding number is only limited by the post height. We introduce a specially designed structure to determine the forces caused by the winding process. These measured forces are confirmed by shear test data. Electrical measurements show a quality factor of over 50.
• T. Hansel, G. Steinmeyer, R. Grunwald, U. Griebner, F. Schneider, U. Wallrabe
  High-speed contouring of an adaptive fluidic lens with two-wavelength single-pulse digital holography,
  2009 Digital Holography and Three-Dimensional Imaging/ Vancouver, Canada Proc. Digital Holography and Three-Dimensional Imaging 2009
  » show abstract« hide abstract
  Abstract

  Contouring of dynamic phase changes of a piezoelectrically driven fluidic lens with a temporal resolution of 410 frames/s is presented. Using a dual-wavelength few-ps source, optical path differences of several 10 µm are unambiguously detected.
• K. Kratt, V. Badilita, T. Burger, J.G. Korvink, U. Wallrabe
  Micro Helmholtz coil pair towards cellular application
  2009 ISMRM, Hawaii, USA
• U. Wallrabe, J. G. Korvink, K. Kratt
  Micro coil manufacturing,
  2009 Sensors, MEMS and Electro-optic Systems (SMEOS) Conference/ Skukuza, Kruger National Park, South Africa Proc. SMEOS Conference 2009
• F. Schneider, J. Draheim, P. Waibel, C. Müller, U. Wallrabe
  Optische Qualität und Systemverhalten von adaptiven Silikonmembranlinsen
  2009 Mikrosystemtechnikkongress, Berlin , pages: 329 - 332
• F. Schneider, J. Draheim, P. Waibel, C. Müller, U. Wallrabe
  Optische Qualität und Systemverhalten von adaptiven Silikonmembranlinsen,
  2009 MST Kongress/ Berlin, Germany Proc. MST Kongress 2009, VDE Verlag
  » show abstract« hide abstract
  Abstract

  In diesem Beitrag vergleichen wir zwei verschiedene adaptive Silikonmembranlinsen: Eine Linse mit einer homogenen Membrandicke und eine mit einer plankonvexen Membrangeometrie. Die Linsensysteme verfügen über einen integrierten Piezoelektrischen Pumpaktor. Die Linse mit plankonvexer Membrangeometrie zeigt eine bessere Linsenqualität (WFFrms = 24 nm) als die Homogene (WFFrms = 31 nm). Jedoch spannt das homogene System verglichen zum inhomogenen einen deutlich größeren Brechkraftbereich von +19...-14 dpt bei UPiezo = ±40 V auf. Die Ansprechzeit der Linse mit homogener Membran beträgt 23,9 ms und die der Linse mit inhomogener Membran 35,4 ms.
• K. Land, F. Schneider, J. G. Korvink, S. Potgieter, L. Fourie, A. Novel
  Passive normally closed microfluidic valve,
  2009 Sensors, MEMS and Electro-optic Systems (SMEOS) Conference/ Skukuza, Kruger National Park, South Africa Proc. SMEOS Conference 2009
• R. Kamberger, F .Schneider, J. Draheim, U. Wallrabe
  Reliable filling procedure for a fluidic membrane lens,
  2009 MicroMechanics Europe 2009, 20th Workshop on Micromechanics/ Toulouse, France Proc. MicroMechanics Europe 2009
• S. Schonhardt, J.G. Korvink, U. Wallrabe
  Robust comb design for inductive displacement sensor with large travel and high sensitivity.
  2009 Transducers 2009, Denver, Co., USA , pages: 1912 - 1915
• T. Hansel, R. Grunwald, G. Steinmeyer, U. Griebner, F. Schneider, U. Wallrabe
  Time-resolved two-wavelength contouring of adaptive fluidic PDMS-lenses,
  2009 SPIE Europe Optics and Optoelectronics/ Prag, Tschechien Proc. SPIE 2009, volume: 7358
  » show abstract« hide abstract
  Abstract

  We present a synthesized sub-ps dual-wavelength laser source for digital holographic interferometry with a wide reconstruction range. The developed laser source generates two spectrally separated parts within one pulse. The sub-ps pulse duration desensitizes the holographic setup to environmental impacts. A center wavelength distance of only 12 nm with a high contrast was demonstrated by spectral shaping of the 50 nm broad seed spectrum of a CPA Ti:sapphire laser system centered at 800 nm. Time-resolved two-wavelength contouring requires the simultaneous and separable recording of two holograms. In general, a single CCD-camera is applied, and the spectral separation is realized by different reference wave tilts, which requires ambitious interferometric setups. Contrary to this, we introduce two CCD-cameras for digital holographic recording, thus essentially simplifying the interferometric setup by the need of only one propagation direction of the reference wave. To separate the holograms for the simultaneous recording process, a Mach-Zehnder interferometer was extended by a polarization encoding sequence. To study our approach of time-resolved digital holographic two-wavelength contouring, an adaptive fluidic PDMS-lens with integrated piezoelectric actuator served as test object. The PDMS-lens consists of an oil-filled lens chamber and a pump actuator. If a voltage is applied to the piezoelectric bending actuator the fluid is pumped into the lens chamber which causes a curvature change of the 60-μm thick lens membrane and thus a shift of the focal length. The dynamic behavior of the PDMS-lens, driven at a frequency of 1 Hz, was investigated at a frame rate of 410 frames per second. The measured temporal change of the lens focal length between 98 and 44 mm followed the modulation of the piezoelectric voltage with a 30 V peak-to-peak amplitude. Due to the performed time-resolved two wavelength contouring, we are able to extract the optical path length differences between center and perimeter of the lens. From the calculated phase difference maps we estimated large optical path differences of larger than 10 μm, corresponding to more than 15 times of the source wavelength.
• T.-M. Chen, Z. Liu, J. G. Korvink, S. Krausse, U. Wallrabe
  Topology optimization for a micro rotational mirror design and safe manufacturing
  2009 MEMS, Sorrento, Italien Micro Electro Mechanical Systems, IEEE, pages: 1019 - 1022
• B. Lemke, K. Kratt, R. Baskaran, O. Paul
  Towards piezoresistive CMOS sensors for out-of plane stress,
  2009 IEEE 21nd International Conference on Micro Electro Mechanical Systems/ Sorrento, Italy Proc. MEMS 2009, IEEE, pages: 781 - 784
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  Abstract

  This paper presents a novel piezoresistive sensor detecting a temperature compensated sum of the three mechanical normal stress components including the Out-of-plane stress iquestzz. The sensor is based on CMOS-compatible diffusions designed to exploit vertical currents. We show that the temperature compensated stress sum can be extracted via two different sensor designs and even with a single device exploiting the strong influence of the junction field effect in the sensor. For this purpose, an experimental setup that induces homogenous vertical normal stress sigmazz by applying a vertical force via a gold bump to the sensor is presented. For the characterization, the resulting mechanical stress at the sensor location was evaluated using finite element simulations. Sensitivities, depending on gold bump shape and bias current, were experimentally determined and vertical forces were successfully extracted between 10degC and 60degC, independent of temperature.

2008

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• F. Schneider, D. Eberhard, D. Strohmeier, C. Müller, U. Wallrabe
  Adaptive PDMS-membrane lens,
  2008 OPTO 2008/ Nürnberg, Germany Proc. OPTO 2008
• F. Schneider, D. Eberhard, D. Strohmeier, C. Müller, U. Wallrabe
  Adaptive fluidic PDMS-lens with integrated piezoelectric actuator
  2008 MEMS, Tucson, Arizona, USA Proc MEMS, pages: 120 - 123
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  Abstract

  We present the first adaptive microfluidic PDMS-lens system with an integrated piezoelectric pumping actuator. The system is fabricated in a highly streamlined fabrication process through casting via a hot embossing machine and subsequent oxygen bonding of the layers. With an optimized piezo actuator the achieved focal length ranges from 30 to 500 mm at a voltage from -9 to 44 V. We show that the lens resolution is crucially dependent on the thickness of the lens membrane. For an optimum thickness of 230 um at 5 mm diameter the lenses achieve a resolution of 120 linepairs/mm at a contrast of 50 %.
• S. Schonhardt, J.G. Korvink, U. Hollenbach, J. Mohr, U. Wallrabe
  Cascaded electromagnetic comb drive actuator
  2008 ACTUATOR, Bremen , pages: 338 - 341
• B. Mack, M. Stürmer, U. Wallrabe
  Comparison of different relative movement directions of magnet and coil in an electromagnetic energy harvester
  2008 Power MEMS, Sendai, Japan , pages: 313 - 316
• J. Draheim, F. Schneider, U. Wallrabe
  Elastic pump actuator for adaptive optics,
  2008 Actuator, 11th International Conference on new Actuators/ Bremen, Germany Proc. Actuator 2008
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  Abstract

  This work presents an electromagnetic pump actuator for deformable mirrors. The actuator consists of a volume of a magnetic fluid which is attracted by an electro-magnet and a PDMS (Polydimethylsiloxan) membrane which is covered by a reflec-tive layer to form an adaptive mirror. A variable magnetic field is generated by a coil positioned under the lower membrane using currents between 0 and 100 mA. This results in membrane displacements up to 23 μm.
• S. Schonhardt, J.G. Korvink, J. Mohr, U. Hollenbach, U. Wallrabe
  Magnetic comb drive actuator
  2008 MEMS tucson, Arizona, USA J Microelectromech S, IEEE, pages: 479 - 482
• K. Kratt, J. G. Korvink, U. Wallrabe
  Micro coil manufacturing,
  2008 ACTUATOR, 11th International Conference on New Actutators/ Bremen, Germany ACTUATOR 2008, pages: 311 - 317
• M. Langelaar, Z. Liu, J. Brunne, F. Schneider, U. Wallrabe, J. G. Korvink
  Shape and topology optimization of an integrated piezoelectric micro lens actuator,
  2008 International Conference on Engineering Optimization/ Rio de Janeiro, Brazil Proc. International Conference on Engineering Optimization 2008
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  Abstract

  Adaptive micro uidic lens systems actuated using piezoelectric plates are promising low-cost alterna- tives to miniaturized conventional autofocus systems. The performance of the piezoelectric actuator is a key issue for this category of novel integrated optical devices. In this contribution, we present the design optimization of a miniature piezoelectric actuator using structural size and topology optimization techniques. The objective considered in this paper is the maximization of the uid volume displaced by the stroke of the actuator. Particularly interesting and novel aspects of the present work are the interaction between the actuator and the compliant PDMS structure in which it is embedded, as well as the application of structural optimization techniques to a realistic and practical piezoelectric actuation problem.
• K. Kratt, M. Seidel, M. Emmenegger, U. Wallrabe, J. G. Korvink
  Solenoidal micro coils manufactured with a wire bonder,
  2008 MEMS 2008. IEEE 21st International Conference/ Tucson, AZ, USA Proc. MEMS 2008, IEEE, pages: 996 - 999
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  Abstract

  We present for the first time the development of 3-D solenoidal micro coils using an automatic wire bonder. By developing a stable and repeatable bond process with insulated wire, micro coils with sub-millimeter diameter have been manufactured. The winding process for a single coil takes about 200 ms, whereas the manufacture of a 100-coil-array takes less than a minute. Micro coils with 4 windings and a diameter of 690 p~exh ibit an inductance of 12.7 nH and a resistance of 580 yQ at 300 MHz. These values correspond to a quality factor of 41 and compare favorably to state-of-the-art micro coil manufacturing technologies.
• K. Kratt, U. Wallrabe, J. G. Korvink
  Solenoidal out-of-plane micro coils for MR analysis manufactured with a wire bonder
  2008 ISMRM, Toronto, Ontario, Canada , volume: Paper No. 1098

2007

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• F. Schneider, C. Müller, U. Ulmer, D. Eberhard, H. Besser, W. Pfleging, U. Wallrabe
  Adaptive Silikonmembranlinsen mit integriertem Piezo-Aktor,
  2007 MikroSystemTechnik Kongress/ Dresden Proc. MST Kongress 2007, VDE Verlag
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  Abstract

  In diesem Beitrag werden adaptive Flüssiglinsen mit dicken Silikonmembranen in einem Durchmesserbereich von 5 bis 15 mm vorgestellt. Die Membranen werden mittels Gießtechnik in einem Batchprozess gefertigt. Die Linsen verfügen über integrierte Piezobiegewandler, welche ebenfalls in Silikon eingebettet werden. Die hier vorgestellten Linsen erschließen Anwendungsfelder, die von den am Markt etablierten Electrowetting-Linsen (Durchmesser < 5 mm) nicht abgedeckt werden.
• S. Schonhardt, U. Wallrabe, J.G. Korvink
  Influence of the pole-shoe geometry to the motion characteristics of an electro-magnetic linear actuator fabricated in LIGA Technology
  2007 7th International Workshop on High-Aspect-Ratio Micro-Structure Tecnology, Besancon, Frankreich , pages: 121 - 122
• F. Schneider, C. Müller, U. Wallrabe
  Low cost adaptive silicone membrane lens,
  2007 Optical MEMS and Nanophotonics 2007, Hualien, Taiwan Proc Optical MEMS and Nanophotonics, pages: 145 - 146
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  Abstract

  We present the first adaptive silicone membrane lens with an integrated piezoelectric actuator. The system consists of two components, lens (5 mm diameter) and actuator (15 mm diameter). Both components are cast in a hot embossing machine to ensure a reliable and cheap fabrication. At a voltage variation of 55 V we obtain a focal length between 30 and 500 mm. Furthermore the lens shows a maximum resolution of 100 line pairs per millimeter at a focal length of 100 mm.
• S. Schonhardt, O. Gruschke, C. Müller, J.G. Korvink, U. Hollenbach, J. Mohr, K. Bade, U. Wallrabe
  Untersuchung des Einflusses der Polschuhneigung und Materialeigenschaften auf das Bewegungsverhaltenvon elektromagnetischen Aktoren
  2007 Mikrosystemtechnikkongress, Dresden, Deutschland , pages: 967 - 970

2006

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• Z. Liu, J. G. Korvink, U. Wallrabe, C. Müller
  Design of compliant rotational mirror with structural topology optimization
  2006 ACTUATOR 2006, Bremen, Deutschland , pages: 716 - 719
• S. Schonhardt, J.G. Korvink, U. Wallrabe
  Low power electromagnetic actuators with large travelling range
  2006 ACTUATOR. Bremen, Deutschland , pages: 124 - 128
• F. Schneider, D. Hohlfeld, U. Wallrabe
  Miniaturized electromagnetic ferrofluid actuator,
  2006 ACTUATOR 2006, Proc. 10th Int. Conf. New Actuators
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  Abstract

  This work presents the assembly, characterisation and multiphysics simulation of a hydraulic actuator. The actuator uses ferrofluid, which is encapsulated between two PDMS membranes. This setup can be used to pump other fluids. If a magnetic field i

2005

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• F. Schneider, D. Hohlfeld, U. Wallrabe
  Evaluation von Ferrofluiden für hydraulische Aktoren,
  2005 Mikrosystemtechnik Kongress/ Freiburg, Germany Proc. MST Kongress 2005, VDE Verlag, pages: 831 - 834
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  Abstract

  In diesem Beitrag wird der Aufbau eines auf Ferrofluiden basierenden hydraulischen Aktors vorgestellt und für die Mikrotechnik evaluiert. Das sich zwischen einer Silikon-Doppelmembran befindliche Ferrofluid wird durch ein oberhalb der Membran anliegendes Magnetfeld ausgelenkt und erzeugt dadurch unterhalb der Doppelmembran einen Unterdruck und eine Volumenverdrängung. Diese kann zum Pumpen weiterer Fluide genutzt werden. Der dabei im statischen Fall gemessene maximale Unterdruck des Aktors beträgt 930 Pa. Das verdrängte maximale Volumen ohne Gegendruck beträgt 10,7 µl.
• S. Schonhardt, U. Wallrabe, J.G. Korvink, C. Solf
  Untersuchung des Stabilitätsverhaltens von elektromagnetischen Aktoren
  2005 Mikrosystemtechnikkongresse 2005, Freiburg, Deutschland , pages: 835 - 838

2004

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• P. Henzi, D. Rabus, U. Wallrabe, J. Mohr
  Fabrication of photonic integrated circuits by DUV-induced modification of polymers
  2004 SPIE Photonics Europe, Strasbourg, France SPIE, volume: 5451, pages: 24 - 31
• P. Henzi, D. Rabus, U. Wallrabe, J. Mohr
  Fabrication of photonic integrated circuits by DUV-induced modification of polymers
  2004 SPIE Photonics Europe, Strasbourg, France SPIE, volume: 5451, pages: 24 - 31
• P. Henzi, D. Rabus, U. Wallrabe, J. Mohr
  Low cost single mode waveguide fabrication allowing passive fibre coupling using LIGA and UV flood exposure
  2004 SPIE Photonics Europe, Strasbourg, France SPIE, volume: 5454, pages: 64 - 74
• U. Wallrabe, J. Mohr, C. Solf
  Mini-FT-Spectrometer for the near infrared
  2004 EUROSENSORS XVIII, Rome, Italy , pages: 160 - 161
• U. Wallrabe, J. Mohr, C. Solf
  Miniaturized FTIR spectrometer with large travel electromagnetic linear actuator consuming low power
  2004 Actuator 2004, Bremen, Germany , pages: 321 - 324
• U. Hollenbach, J. Mohr, T. Oka, U. Wallrabe, I. Sieber
  Novel design and prototyping of a micro-optical distance sensor considering a distributed fabrication.
  2004 SPIE Photonics Europe, Strasbourg, France SPIE, volume: 5459, pages: 211 - 218
• P. Henzi, D. Rabus, U. Wallrabe, J. Mohr
  UV-induced modification of dielectric properties of polymers for fabrication of passive planar lightwave circuits
  2004 LEOS IEEE 2004, Puerto Rico , volume: Vol. 2, pages: 792 - 793

2003

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• P. Henzi, R. Truckenmüller, D. Hermann, S. Achenbach, U. Wallrabe, J. Mohr
  Bonding of LIGA PMMA microstructures by UV irraditation and lkow temperature welding
  2003 HARMST 2003, Monterey, California, USA , pages: 197 - 198
• C. Solf, A. Janssen, J. Mohr, A. Ruzzu, U. Wallrabe
  Incorporating design rules into the LIGA technology applied to a Fourier transformation spectrometer
  2003 HARMST 2003, Monterey, California, USA , pages: 183 - 184
• U. Wallrabe, U. Hollenbach, J. Mohr, T. Oka
  Manufacturing line for the distributed fabrication of modular microoptical systems
  2003 MICRO.tec 2003, Munich, Germany , pages: 195 - 199
• T. Oka, M. Tsugai, K. Takashima, U. Wallrabe, U. Hollenbach, J. Mohr
  Micro opticals distance sensor fabricated by micromachining technology
  2003 SENSOR 2003, Nuermberg, Germany , pages: 133 - 137
• J. Mohr, U. Hollenbach, A. Last, U. Wallrabe
  Microoptics made by LIGA technology
  2003 HARMST 2003, Monterey, California , pages: 169 - 170
• C. Solf, J. Mohr, U. Wallrabe
  Miniaturized LIGA Fourier transformation spectrometer
  2003 2003 IEEE Sensors, Toronto, Canada , pages: 773 - 776

2002

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• U. Hollenbach, P. Krippner, J. Mohr, T. Oka, U. Wallrabe
  A modular fabricatin concept for EOSS is demonstrated by a micro optical distance sensor
  2002 OPTO 2002, Erfurt, Germany , pages: 133 - 136
• U. Wallrabe, U. Hollenbach, P. Krippner, J. Mohr, T. Oka
  Characterization of a micro optical distance sensor
  2002 IEEE/LEOS Int.Conference on Optical MEMS, Lugano, Switzerland , pages: 29 - 30

2001

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• J. Mohr, A. Last, U. Hollenbach, T. Oka, U. Wallrabe
  A modular fabrication concept for micro optical systems
  2001 IEEE/LEOS Int. Conference on Optical MEMS, Okinawa, Japan , pages: 77 - 78
• T. Oka, H. Nakajima, A. Shiratsuki, M. Tsugai, U. Wallrabe, U. Hollenbach, P. Krippner, J. Mohr
  Development of a micro optical distance sensor with electric I/O interface
  2001 TRANSDUCERS 01, Munich, Germany , pages: 536 - 539
• A. Ruzzu, A. Dieckmann, J. Mohr, U. Wallrabe
  Scalable opto-electromechanical switch-array with passively aligned free-space optical components
  2001 IEEE/LEOS Int. Conference on Optical MEMS, Okinawa, Japan , pages: 19 - 20
• Th. Schaller, H. Dittrich, A. Gerlach, A.E. Guber, M. Heckele, A. Muslija, U. Wallrabe, W. Zissler
  Small tolerances & large areas. Micromachining meets industrial requirements.
  2001 EUSPEN 2nd Int. Conference, Turin, Italy , volume: 2, pages: 676 - 679

2000

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• S.-J. Chung, H. Hein, J. Mohr, F.J. Pantenburg, J. Schulz, U. Wallrabe
  LIGA technology today and its industrial applications
  2000 SPIE Microrobotics and Microassembly II, Boston, Ma., USA SPIE, volume: 4194, pages: 44 - 55
• C. Rembe, H. Aschemann, S. aus der Wiesche, E. P. Hofer, H. Debéda, J. Mohr, U. Wallrabe
  Nontactile reliability testing of a micro-optical attentuator
  2000 IEEE 2000 Int. Reliability Physics Symposium (IRPS). San José, CA. USA , pages: 123 - 128
• A. Ruzzu, D. Haller, J. Mohr, U. Wallrabe
  Optical 2x2 switch matrix with electromechanical micromotors
  2000 MOEMS and Miniaturized Systems, Santa Clara, CA., USA SPIE Micromachining and Microfabrication, volume: 4178, pages: 67 - 76

1999

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• K. Schumacher, O. Krömer, U. Wallrabe, J. Mohr, V. Saile
  Micromechanical LIGA gyroscope
  1999 TRANSDUCERS 99, Sendai, Japan , volume: 2, pages: 1574 - 1577
• R. Ruprecht, M. Berner, H. Fischer, A. Guber, W. Pfleging, V. Piotter, A. Schüssler, U. Wallrabe, K. F. Weibezahn
  Miniaturisierung in der Medizintechnik, Herstellung von Mikrokomponenten für die minimal invasive Therapie und Analytik
  1999 23. Jahrestagung der Spritzgießtechnik des VDI-K, Baden-Baden, Germany , pages: 109 - 133

1998

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• A. Ruzzu, J. Fahrenberg, M. Müller, C. Rembe, U. Wallrabe
  A cutter with rotational-speed dependent diameter for interventional catheter systems
  1998 MEMS 98, Heidelberg, Germany IEEE Micro Electro Mechanical Systems, pages: 499 - 503
• H. Debéda, J. Mohr, C. Rembe, J. Schulz, U. Wallrabe, J. Wengelink
  Fully batch fabricated LIGA actuators integrated on Piezo electric ceramic substrates
  1998 ACTUATOR 98, Bremen, Germany , pages: 54 - 57
• T.v. Freyhold, H. Debéda, P. Krippner, J. Mohr, U. Wallrabe, J. Wengelink
  Miniaturized Piezo electric chopper for fiber optical multimode applications realized using LIGA technology
  1998 Optical MEMS 98, IEEE/LEOS Summer Topical Meetings, Monterey, CA, USA , pages: 75 - 76
• J. Wengelink, H. Debéda, J. Mohr, U. Wallrabe
  Miniaturized Piezo electric optical attentuator, realized by using LIGA technology
  1998 OPTO 98, Erfurt, Germany , pages: 133 - 136

1997

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• A. Ruzzu, D. Maas, U. Wallrabe, J. Mohr
  Catheter tips with integrated positioning system
  1997 9th Annual International Meeting, Kyoto, Japan Minim Invasiv Ther, volume: 6, supplement: 1, page: 56
• U. Wallrabe, S. Hansen, G. Leipert, J. Mohr, A. Ruzzu
  Microturbine for integration on catheters and endoscopes
  1997 9th Annual International Meeting, Kyoto, Japan Minim Invasiv Ther, volume: 6, supplement: 1, page: 56

1996

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• U. Wallrabe
  Application of LIGA-Technology in Medical Research
  1996 PIMS (Polymers in Medicine and Surgery) 96, Glasgow, UK The Institute of Materials, pages: 97 - 104
• U. Wallrabe, J. Mohr, I. Tesari, K. Wulff
  Power characteristics of 3-d operated microturbines for minimally invasive therapy
  1996 MEMS 96, San Diego, CA, USA IEEE Micro Electro Mechanical Systems, pages: 462 - 466

1995

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• U. Wallrabe, W. Menz, J. Mohr, M. Schaufler, M. Schwörer
  Radial and axial-flow microturbines providing power output
  1995 MIMR´95 (Int. Symposium on Microsystems, Intelligent Materials and Robots), Sendai,Japan , pages: 49 - 52
• T. Bieger, U. Wallrabe
  Reibungs- und Verschleißuntersuchungen an LIGA-Mikrostrukturen
  1995 3. VDE-Mikroelektronik-Forum , pages: 151 - 155

1992

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• U. Wallrabe, P. Bley, B. Krevet, W. Menz, J. Mohr
  Theoretical and experimental results of an electrostatic micromotor with large gear ratio fabricated by the LIGA-process
  1992 MEMS 92, Travemünde, Germany IEEE Micro Electro Mechanical Systems, pages: 139 - 140

1991

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• J. Mohr, P. Bley, C. Burbaum, W. Menz, U. Wallrabe
  Fabrication of microsensor and microactuator elements by the LIGA-process
  1991 TRANSDUCERS 91, San Francisco, CA, USA IEEE, pages: 607 - 609
• U. Wallrabe, M. Himmelhaus, J. Mohr, P. Bley, W. Menz
  Rotierende Mikrostrukturen als Grundlage für einen mikromechanischen Strömungsmesser
  1991 Tagung "Werkstoffe der Mikrotechnik- Basis für neue Produkte", Karlsruhe VDI-Berichte 933, VDI-Verlag, Düsseldorf, pages: 327 - 337
• P. Bley, J. Göttert, M. Harmening, M. Himmelhaus, W. Menz, J. Mohr, C. Müller, U. Wallrabe
  The LIGA-process for the fabrication of micromechanical and microoptical components
  1991 MICROSYSTEMS Technologies 91, Berlin, Germany VDE-Verlag, pages: 302 - 314

1990

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• J. Mohr, C. Burbaum, P. Bley, W. Menz, U. Wallrabe
  Movable microstructures manufactured by the LIGA-process as basic elements for microsystems
  1990 Microsystem Technologies 90, Berlin Germany Springer Verlag, pages: 529 - 537