Projects
"MAXWELL" DFG Wa 1657/3-1
Project description
The goal of the project is the development of tunable aspherical MEMS mirrors with minimal optical dispersion for ultrashort-pulse beam shaping.
Start/End of project
07.09.2011 until 06.09.2014
Project manager
Prof. Dr. U. Wallrabe
Partners
Max-Born-Institut für Nichtlineare Optik und Kurzpulsspektroskopie (MBI)
Keywords
optical MEMS, optische Messtechnik, optical measurement, Mikro-optische Komponenten, micro-optical components, Bulk-Mikromechanik, bulk micromechanics, Kunststoff-Replikation, polymer replication, Piezoaktoren, piezo actuators, Polymere, polymers