Projects

Liquid crystal elastomers (LCEs) are an exciting new “artificial muscle” material which we have demonstrated in previous projects to be useful for actuation of a wide variety of micro-optical components. In this project, a collaboration with the laboratory of Prof. Zentel at the University of Mainz, we aim to develop LCE fabrication technology to the point where these polymer actuators can be fabricated with standard microsystems and MEMS processes. We are developing wafer-level processes for fabrication and structuring LCE actuators and integrate these with micro-mechanical structures to demonstrate their efficacy as large-stroke actuators. A first major milestone is the alignment of the liquid crystals on a substrate to define the actuation direction. Using a projected pattern of polarized light, any desired photoalignment can be achieved. Future milestones are the surface relief of the LCE-actuators for free actuation and the integration in optical components. Following in-depth characterization of their mechanical and actuating properties, we will demonstrate the utility of LCE MEMS through the design and realization of two tunable optical systems. We will develop wafer-level fabrication processes for fabrication and structuring LCE actuators and integrate these with micro-mechanical structures to demonstrate their efficacy as large-stroke actuators. Following in-depth characterization of their mechanical and actuating properties, we will demonstrate the utility of LCE MEMS through the design and realization of two tunable optical systems.