Projects
Fabrication processes to determine the fracture-mechanical properties in thin polysilicon layers
Project description
We realize, based in our wafer-level micro-tensile test setup, MEMS structures to determine the fracture-mechanical properties auf thin polysilicon layers realized and patterned by low pressure chemical vapor deposition (LPCVD) and reactive ion etching (RIE), respectively.
Start/End of project
14.12.2010 until 15.03.2011
Project manager
Prof. Dr. Oliver Paul
Contact person
Prof. Dr. Oliver Paul
Phone:+49 761 203 7190
Email:paul@imtek.de
Funding
Nagoya Institute of Technology (NIT), Japan