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Test structures for epi-poly layers

Project description

We develop and fabricate MEMS-based test-structures to analyse the mechanical behaviour of thin-films made of polysilicon using a micro-tensile test

Start/End of project

18.08.2006 until 15.11.2008

Project manager

Prof. Dr. Oliver Paul

Contact person

Prof. Dr. Oliver Paul
Phone:+49 761 203 7191


Robert Bosch GmbH
Benutzerspezifische Werkzeuge