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Project description

We develop and fabricate in cooperation with colleagues from the Institute for Micro Process Engineering (IMVT) at the Research Center Karlsruhe in the framework of the Virtual Institute for Microsystemstechnologies (VIM) a testchip that enables to monitor the temperature distribution in micro reactors. The resistive and thermoelectric temperature sensors are implemented in thin-film membranes integrated in silicon-chips fabricated in house. These sensor chips enable to characterize the heat transfer of gases in microchannels.

Start/End of project

01.02.2010 until 31.07.2010

Project manager

Prof. Dr. Oliver Paul

Contact person

Prof. Dr. Oliver Paul


Karlsruher Institut für Technologie
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