Projects
High precision displacement sensor for AFM probe heads
Project description
This project, completed in 2012, concerned the design and demonstration of novel optical methods for extremely high precision measurement of mechanical displacement. Accuracy in the single nanometer range over long measurement distances was achieved.
Start/End of project
01.05.2011 until 30.04.2012
Project manager
Prof. Dr. Hans Zappe
Contact person
Dr. Andreas Seifert
Phone:7560
Partners
Nanosurf AG (CH)