Projects
VIM-IMVT
Project description
We develop and fabricate in cooperation with colleagues from the Institute for Micro Process Engineering (IMVT) at the Research Center Karlsruhe in the framework of the Virtual Institute for Microsystemstechnologies (VIM) a testchip that enables to monitor the temperature distribution in micro reactors. The resistive and thermoelectric temperature sensors are implemented in thin-film membranes integrated in silicon-chips fabricated in house. These sensor chips enable to characterize the heat transfer of gases in microchannels.
Start/End of project
01.02.2010 until 31.07.2010
Project manager
Prof. Dr. Oliver Paul
Contact person
Prof. Dr. Oliver Paul
Phone:+497612037191
Email:paul@imtek.de
Funding
Karlsruher Institut für Technologie